Vertical in-line sputtering machine OPT-S 1800

magnetronfor automotive applications

Product Overview
OPT-S 1800 is a magnetron sputtering optical coating machine featuring an effective coating area of Ø940 × H1600 mm and a chamber of Ø1200 × H2180 mm. It employs ion-source etching and is listed with 8 sputtering sources; planar or cylindrical source configurations are available. The system supports vertical planetary cylindrical workpiece carriers and is suitable for multilayer optical film deposition.

Applications

• Optical lenses
• Automotive panels
• Display screens
• LiDAR
• Head-up displays (HUD)

Listed Film Types

• Cut-off filters
• Band-pass filters
• RGB filters
• AR (Anti-Reflection)
• Hard AR
• IR-AR
• HR (High Reflectance)
• AS/AF (Anti-Smudge / Anti-Fingerprint)
• ITO coatings

Key Benefits

• 8 sputtering sources (planar or cylindrical options) for flexible deposition configurations
• Online optical monitoring system (real-time spectral monitoring and deposition endpoint control) for multilayer films
• Vertical planetary workpiece motion (revolution and rotation) to support uniform film-thickness distribution
• Dense, adherent optical films with low absorption and scattering due to sputtering process
• Touch-screen and PLC control with manual / semi-automatic / fully automatic modes
• Listed with 8 molecular pumps for vacuum performance and stability

Product Parameters (table representation)
Model: OPT-S 1800
Coating Technology: Magnetron sputtering
Etching Technology: Ion-source etching
Substrate Materials: Glass, crystalline materials, polymers, ceramics and metals
Equipment Structure: Integrated vertical system; side-opening door; 2 viewing windows
Workpiece Carrier Motion: Vertical planetary cylindrical workpiece carrier system
Working Temperature: Adjustable from room temperature to 300°C
Ultimate Vacuum: 8 × 10⁻⁵ Pa (no-load, clean-room condition)
Control Modes: Manual / semi-automatic / fully automatic; touch screen + PLC
Process Gases: Argon, nitrogen, oxygen and acetylene
Optical Monitoring: Online optical monitoring system (OMS)
Bias Power Supplies: 1
Equipment Dimensions (L × W × H): L4.0 × W2.1 × H3.3 m

Specifications / Technical Characteristics

• Effective coating area: Ø940 × H1600 mm
• Chamber size: Ø1200 × H2180 mm
• Sputtering sources: 8 (planar or cylindrical options)
• Workpiece carrier specification: Ø170 × 12 shafts (adjustable according to requirements)
• Ultimate vacuum: 8 × 10⁻⁵ Pa (no-load, clean-room condition)
• Working temperature range: room temperature to 300°C
• Process gases supported: Argon, Nitrogen, Oxygen, Acetylene
• Control: Touch-screen + PLC; manual / semi-automatic / fully automatic
• Optical monitoring: Online OMS for real-time spectral monitoring and endpoint control
• Equipment footprint: L4.0 × W2.1 × H3.3 m
• Structure: Integrated vertical system with side-opening door and 2 viewing windows
• Typical applications: optical lenses, automotive panels, display screens, LiDAR, HUD