Magnetron sputtering machine OPT-S 1700

vertical in-linefor automotive applications

Product Overview
OPT-S 1700 is a magnetron sputtering optical coating machine with a Φ940 × H1200 mm effective coating area and a Φ1200 × H1900 mm chamber. It uses ion-source etching and 8 sputtering sources, with planar or cylindrical source options. The OPT-S series covers optical lenses, automotive panels, display screens, LiDAR and head-up displays. Listed film types include cut-off, band-pass and RGB filters, AR, hard AR, IR-AR, HR, AS/AF and ITO coatings.

Key Benefits

• 8 sputtering sources with planar or cylindrical source options.
• Online optical monitoring system for real-time spectral monitoring and deposition endpoint control.
• Vertical planetary workpiece motion (revolution and rotation) to support uniform film-thickness distribution for multilayer optical coatings.
• Sputtering process yields dense, adherent optical films with low absorption and scattering losses.
• Touch-screen and PLC control for manual / semi-automatic / fully automatic operation.

Features

• Effective coating area: Φ940 × H1200 mm.
• Chamber size: Φ1200 × H1900 mm.
• Workpiece carrier: Φ170 × 12 shafts (workpiece carrier specification, adjustable per requirements).
• 6 molecular pumps for vacuum system.
• Supports multiple film types (cut-off, band-pass, RGB filters, AR, hard AR, IR-AR, HR, AS/AF, ITO).

Product Parameters
Model: OPT-S 1700
Coating Technology: Magnetron sputtering
Etching Technology: Ion-source etching
Substrate Materials: Glass, crystalline materials, polymers, ceramics and metals
Equipment Structure: Integrated vertical system; side-opening door; 2 viewing windows
Workpiece Carrier Motion: Vertical planetary cylindrical workpiece carrier system
Workpiece Carrier Specification: Φ170 × 12 shafts (adjustable)
Working Temperature: Adjustable from room temperature to 300°C
Ultimate Vacuum: 8 × 10⁻⁵ Pa (no-load, clean-room condition)
Control Modes: Manual / semi-automatic / fully automatic; touch screen + PLC
Process Gases: Argon, nitrogen, oxygen and acetylene
Optical Monitoring: Online optical monitoring system (OMS)
Molecular Pumps: 6
Equipment Dimensions (L × W × H): L4.0 × W2.1 × H3.1 m

Technical specifications

• Model: OPT-S 1700
• Coating: Magnetron sputtering — supports multilayer optical filters and AR/HR/ITO films
• Etching: Ion-source etching
• Effective coating area: Φ940 × H1200 mm
• Chamber: Φ1200 × H1900 mm
• Workpiece carrier: Vertical planetary cylindrical system; Φ170 × 12 shafts (configurable)
• Vacuum performance: 8 × 10⁻⁵ Pa (no-load, clean-room)
• Temperature range: ambient to 300°C
• Control: Touch-screen + PLC; manual / semi-auto / full-auto modes
• Monitoring: Online optical monitoring for spectral/deposition endpoint control
• Pumping: 6 molecular pumps
• Overall dimensions: L4.0 × W2.1 × H3.1 m