Calorimetric flow sensor SFS01-M-01-00050

thermalsiliconmass

Short description
The SFS01 is a thermal mass flow module with linearized digital and analog outputs. Fast and compact, it is designed for gas dosing systems, manifolds and analyzers. The module offers easy integration with a compact housing, factory calibration and pins for hardware address setting. Fluidic interface is compatible with common OEM mass flow meters (e.g. Axetris MFM series).

Benefits & Characteristics of the SFS01

• Fast response time <5 ms
• Low energy consumption
• Easy system integration including temperature compensation
• Customer-specific sensor available on request

Product description SFS01
The SFS is iST's silicon-based flow sensor operated on the calorimetric principle; it measures flow velocity and direction. Its symmetrical sensor design simplifies signal interpretation and evaluation. The sensor supports various gases and is characterized by high sensitivity, fast response and low power consumption. Channel geometries can be adapted to match application requirements. The SFS01 is suitable for space-limited applications and can be upgraded into ready-to-use systems. Typical applications include battery-operated/portable devices, HVAC, automation, and process and control engineering.

Quality
In line with Swiss quality standards, iST is certified to ISO 9001:2015 (quality) and ISO 14001:2015 (environment). Established processes are part of daily operations and are regularly audited and expanded in parallel with company growth.

Technical specifications

• Product Name: SFS01-M-01-00050
• Operating flow range: ±50 sccm (ml/min)
• Measured medium: Gas flow
• Operating temperature range: 0 to 80 °C
• Housing dimensions: 48 x 34 x 14.5 mm
• Housing material: Aluminum, FR4
• Fluidic connection: Ø 2.2 mm i.D. flat gasket
• Wetted materials: Aluminum, gold, FR4, silicon, silicon nitride, epoxy, nitrile
• Connection type: PCB connector JST SM08B-SRSS-TB
• Response time t63: 20 ms
• Weight: 30 g
• Supply voltage: 5V DC ±5%
• Output signal: I2C or 0 to 1 V
• Accuracy: 2% f.s. (digital output)
• Repeatability: 0.2% f.s.
• Product code: 154809