Dosing station JW-300-LDS CDS

Overview
The Chemical Delivery Module (CDM) JW-300-LDS CDS centers on Ultra-High Purity (UHP) diaphragm valves designed for handling aggressive etchants and abrasive slurries in semiconductor production. Proper valve selection, monitoring and maintenance are essential to prevent contamination, particle shedding and unscheduled downtime.

Maintenance and Design Recommendations
Choose UHP diaphragm valves with metal-to-metal seals that isolate the process fluid from the actuator to eliminate dead volume. Implement predictive monitoring through the CDM’s PLC: track valve cycle counts and manifold pressure differentials to detect diaphragm degradation before leakage occurs. Establish scheduled flushing protocols with deionized water to avoid chemical crystallization on seats and plan replacement of high-wear components during planned tool-down windows to preserve parts-per-trillion (ppt) purity and extend module lifetime.

Technical Data
Model : JW-300-LDS CDS
Special gas cabinet size : W1900*D800*H2100
Control cabinet power supply : Control power supply: 220VAC, 50HZ, 500W, heating power supply: 220VAC, 50HZ, 1-6KW
Purge : PN2,1/4”MVCJ
High pressure holding : GN2.1/4” MVCJ
Vacuum : 1/2” MVCJ
VENT drain pipe : CDA driver, 1/4" SWG
Pneumatic air source : OD 150MM, silane 810m³/hr; others 204m³/hr
Cabinet ventilation : OD 150MM, silane 810m³/hr; others 204m³/hr
Standard equipment : Automatic switching, automatic purging, explosion-proof and anti-leaving cabinet, explosion-proof self-locking door, explosion-proof glass observation window, leakage alarm, remote cut-off, negative pressure alarm
Operation interface : 10" color touch screen

Optional

• UV/IR Flame Detector
• Cylinder heating
• Panel heating
• Ethernet communication module
• Weight Scale
• Excess Flow Switch
• Smoke Sensor Switch

Application

• Semiconductor
• Photovoltaic
• Solar energy
• Liquid crystal panel
• Optical fiber
• Other production fields

Speciality Chemicals Handled

• HF - Hydrofluoric acid
• HCL - Hydrochloric acid
• H2O2 - Hydrogen Peroxide
• KOH - Potassium Hydroxide
• HNO3 - Nitric acid
• NH4OH - Ammonium Hydroxide
• H2SO4 - Sulfuric acid

Function

• Liquid chemical filtration
• Liquid chemical sampling
• Liquid chemical circulation
• Liquid chemical delivering

Notes on Construction and Performance
Fluid wetted paths use 316L electropolished stainless steel with a 5Ra surface finish to minimize particle shedding and ensure chemical compatibility. Proprietary UHP diaphragm valves incorporate metal-to-metal sealing and PLC-controlled automation for recipe management and predictive maintenance. Multi-tier safety measures include secondary containment, nitrogen blanketing and automated leak detection to protect personnel and yield.

Technical specifications

• Model: JW-300-LDS CDS
• Cabinet size: W1900 × D800 × H2100
• Control power: 220VAC, 50Hz, 500W; heating power: 220VAC, 50Hz, 1–6KW
• Purge gas: PN2, 1/4" MVCJ
• High pressure holding: GN2, 1/4" MVCJ
• Vacuum connection: 1/2" MVCJ
• VENT drain pipe: CDA driver, 1/4" SWG
• Pneumatic air source capacity: OD 150mm; silane 810 m³/hr; others 204 m³/hr
• Cabinet ventilation capacity: OD 150mm; silane 810 m³/hr; others 204 m³/hr
• Operation interface: 10" color touch screen
• Standard safety/equipment features: automatic switching, automatic purging, explosion-proof cabinet and door, explosion-proof glass observation window, leakage alarm, remote cut-off, negative pressure alarm
• Materials & finish: 316L electropolished stainless steel, 5Ra surface finish
• Key functions: filtration, sampling, circulation, delivery of liquid specialty chemicals