Solvent delivery system JW series

waterfor tanksbulk chemical

Overview
In semiconductor fabrication environments, UHP (Ultra-High Purity) liquid chemical delivery systems provide controlled, contamination-minimized transfer of acids, bases and solvents between bulk storage and point-of-use equipment. These systems reduce manual handling and maintain process integrity for high-yield production.

Bulk Chemical Delivery Handling System
The bulk handling infrastructure transports large volumes from external tanks or drum rooms. Typical construction uses electropolished 316L stainless steel or high-grade PFA piping. Transfer methods include automated pressure-transfer or magnetically-coupled pumps to provide steady, pulse-free flow while minimizing particle generation and crystallization.

UHP Liquid Chemical Delivery System (final mile)
The final-mile UHP system delivers chemicals to the point-of-use with advanced filtration, non-contact level sensing and real-time consumption monitoring. Safety and purity measures include secondary containment, automated leak detection and nitrogen blanketing to prevent oxidation and protect operators while ensuring high-purity supply to production tools.

Technical Data
Model: JW-200L-CDM, JW-1000L-CDM
Special gas cabinet size: W2200*D1500*H2000 (double drums) / W2990*D2100*H2000 (double drums)
Control cabinet power supply: 220VAC, 50Hz, 0.5–3KW, leakage protection
Purge: PN2, SS316 1/2" SWG
Ultra-pure water: UPW, JIS 16A bonding
Compressed air: CDA, SS316 1/2" SWG
Waste outlet: Drain, PP DN20 Fusion Socket / Drain, PP DN25 Fusion Socket

Standard / Optional Items

• Emergency manual operation panel (optional)
• High-efficiency filter
• Door sensor (optional)

Application

• Semiconductor
• Photovoltaic
• Solar energy
• Liquid crystal panel
• Optical fiber
• Other high-tech production fields

Specialty Chemicals Handled

• HF - Hydrofluoric acid
• HCL - Hydrochloric acid
• H2O2 - Hydrogen peroxide
• KOH - Potassium hydroxide
• HNO3 - Nitric acid
• NH4OH - Ammonium hydroxide
• H2SO4 - Sulfuric acid

Function

• Liquid chemical filtration
• Liquid chemical sampling
• Liquid chemical circulation
• Liquid chemical delivery

Characteristics / Technical specifications

• Model: JW-200L-CDM; JW-1000L-CDM
• Special gas cabinet size: W2200 × D1500 × H2000 (double drums) or W2990 × D2100 × H2000 (double drums)
• Control cabinet power supply: 220VAC, 50Hz, 0.5–3KW with leakage protection
• Purge: PN2 with SS316 1/2" SWG
• Ultra-pure water connection: UPW, JIS 16A bonding
• Compressed air: CDA with SS316 1/2" SWG
• Waste outlet options: PP DN20 Fusion Socket or PP DN25 Fusion Socket
• Standard equipment: PP shell + transparent PVC observation window, PFA internal pipe valve, nitrogen purging, sampling, fully automatic acid supply, automatic barrel switching, redundant pump configuration (two-in-use + one backup), touchscreen status display, automatic shutoff, alarms and self-checks, multilingual support, multiple signal inputs, code scanner, high-efficiency filter, optional door sensor
• Applications: Semiconductor, Photovoltaic, Solar energy, LCD panel, Optical fiber, other high-tech production fields
• Handled specialty chemicals: HF, HCL, H2O2, KOH, HNO3, NH4OH, H2SO4
• Primary functions: filtration, sampling, circulation, delivery of liquid chemicals