Product DetailsThe FC1500AKMF1000 series consist of a proportional flow control valve FC1500 and a MEMS gas flow meter. FC1500 is a highly refined needle valve driven by a micro step stepper motor. Turndown ratio can reach up to 400:1, with high accuracy, repeatability, and hysteresis. The FC valve is compatible with air, water, and oil. It has a selection of Viton or FFKM O-ring, and body material can be aluminum or stainless steel.
The MEMS gas flow meter features quick response time and high accuracy. It is compatible and calibrated with air. It has exceptional stable output signal and low power consumption. The combination of flow meter with FC valve provides an outstanding performance on high flow control with high resolution.
All our products have CE, SGS, RoHS certification with ISO13485 quality system.
Features- Compact
- High Precision
- High Sensitivity
- High Resolution
Industrial application- Semiconductor equipment
- Cooling Machines
- Dynamic Flow Rate Control
SpecificationType | FC1500AKMF
Flow Range (SLPM) | 0-25 / 0-50 / 0-250 / 0-1000
Max. Pressure | 5 bar (72.5 psig)
Input Signal | 0-10V / 0-5V / 4-20mA / RS485
Monitor Output | 1-5V / RS485
Supply Power (VDc) | 24 VDc (12W)
Medium | Clean compressed air or with 5 µm filter
Accuracy | ±1.5% F.S
Repeatability | 0.025%
Valve Resolution | 0.5 L/min (*inlet pressure 1bar (14.5psi))
Turndown Ratio | 100:1
Display | SLPM (Instant Flow) / SL (Accum Flow)
Temp. (Fluid) | 10~65℃
Temp. (Ambient) | -25~85 ℃
Port | G3/8"
Manifold Material | Aluminum
Wetted Materials | Aluminum, Viton
Electrical Connection | EDZ1550/4
Calibration | Air, 20℃, 101.325kPa
Caractéristiques / Spécifications techniques- Model: FC1500AKMF1500
- Valve type: Proportional flow control valve with MEMS gas flow meter
- Turndown ratio: up to 400:1
- Compatible media: air, water, oil
- O-ring options: Viton or FFKM
- Body material: Aluminum or Stainless Steel
- Certifications: CE, SGS, RoHS, ISO13485