High accuracy, high response linear scale with signal pitch of 400 nm. Supports a wide range of applications and offers the highest performance in its class.
Achieves a measuring length of up to 1,060 mm upon request, and offers the highest-level response speed and accuracy in its class.
Signal pitch : 400 nm
Built-in reference point.
Applications : Precision measuring equipment, precision stages, etc.
Compact size makes machine integration much easier
Theoretically unaffected by changes in temperature, humidity, air pressure and air movement. Unparalled measuring stability achieved by use of low expansion glass
Signal pitch : 400 nm
Applications : High-accuracy microscopes, shape measurement equipment, etc.