Thermal mass flow regulator II

for gasfor nitrogenstainless steel

Overview
The Series II Standard mass flow controller provides precise control and measurement across a wide flow range (0.014 sccm to 1,670 slpm). Designed for industrial and laboratory gas handling, it offers multi-gas and multi-range options, selectable communication interfaces and corrosion-resistant 316L wetted parts.

Key features

• Flow range: 0.014 sccm to 1,670 slpm
• High accuracy: ±0.5% reading + ±0.1% FS (varies by range)
• Turndown ratio: 1:50 (up to 1:187.5 in digital mode)
• Wetted/body material: 316L stainless steel; surface finish ~0.8 µm
• Communication: Analog or digital (RS-232, DeviceNet, Profibus-DP, Modbus-RTU)
• Valve options: Normally open or normally closed

Technical specifications

• Maximum flow rate: up to 1,670 L/min
• Pressure control range: 928 PSIA – 1,450 PSIA
• Connection types: Compression, face-seal male, other; sizes 1/8"–1/2" (6 mm–20 mm)
• Seal materials: EPDM, Kalrez, Viton (standard)
• Accuracy details: ±0.5% reading + ±0.1% full scale (±1% FS for 3–5 ml/min; ±2% FS for <3 ml/min)
• Repeatability: < 0.2% reading
• Settling time: 2–4 seconds (standard)
• Control stability: < ±0.1% FS (typical at 1 L/min N2)
• Operating temperature: -10 °C to 70 °C
• Temperature coefficient: zero < 0.05% FS/°C; span < 0.05% reading/°C
• Pressure coefficient: ~0.1 ATM (N2); ~0.01%/ATM (H2)
• Leak rate: below 2 x 10-9 mbar·L/s He (tested)
• Warm-up: 30 min for optimum accuracy; 2 min for ±2% FS
• Ingress protection: IP40
• Power: +15–24 Vdc, max consumption 320 mA (add 50 mA for Profibus)
• Electrical connection: 9-pin D-connector

Applications

• Gas delivery and blending
• Semiconductor processing and R&D
• Analytical instrumentation and calibration
• Industrial process control and pilot plants

Ordering information

• Specify flow range, calibration gas, connection type/size, seal material and valve action
• Choose communication option (analog, RS-232, DeviceNet, Profibus, Modbus)
• Accessories: mounting brackets, calibration certificates, interface cables