3-axis accelerometer ER-3MA-09

MEMSdigital outputcompact

Introduction The ER-3MA-09 is a 3-axis MEMS accelerometer with digital output capability. Featuring low noise, minimal temperature drift, and excellent long-term stability, it is ideal for high-precision measurement systems. The device is housed in a ceramic package, ensuring reliable performance over extended periods. Features - High stability 3-axis MEMS accelerometer - 40g range - Integrated temperature sensor - Digital output interface - Operating voltage: 3.0V to 3.6V - Ceramic encapsulation (6 x 6 x 2.2 mm) - Operating temperature range: -45 to +85°C Application Structural health monitoring Condition monitoring Inclination measurement Platform stability Robot Inertial Measurement Unit (IMU) Specifications - Product model: ER-3MA-09 - Encapsulation: CLCC14 - Axis: X, Y, Z - Range: 40g - Bandwidth: ≥200 Hz - Group delay: <1.5 ms - Bias (room temp): ±1mg (X,Y), ±1.5mg (Z) - Bias temp drift: <5 mg - Bias temp hysteresis: <1.5 mg - Bias stability (1s): 100ug (X,Y), 150ug (Z) - Bias stability (10s): 75ug (X,Y), 100ug (Z) - Bias instability (Allan): 20ug (X,Y), 25ug (Z) - On-off repeatability: <50ug (X,Y), <75ug (Z) - Scale factor: 12800±13 lsb/g - Scale temp coefficient: 100 ppm/°C - Start time: <200 ms - ODR: 4K Hz - Shock: 3000g - Vibration rectification error: 1mg/grms (X,Y), 3mg/grms (Z) - Operating temperature: -45~+85°C - Supply voltage: 3.3±10% V - Current: <600 uA - Interface: SPI