Calorimetric flow meter MF series

massfor gasfor air

Product category
Mass flow sensing products: mass flow meters

MF3000
The MF3000 series mass flow meters are designed for general-purpose gas metering, processing, monitoring, and/or control. The products feature enhanced flow conditioning for installation flexibility and offer low pressure drop for improved energy efficiency. Designed for easy replacement of mechanical connectors. Standard connectors: for 2–200 SLPM models BSPT 1/4"-male or One-touch connectors; for 500–1500 models BSPT 1/2"-female. Other customized connectors are available.

MF4000
The MF4000 series mass flow meters are designed for general-purpose, precise monitoring and control of industrial gases and can be applied to medical equipment such as anesthesia devices, endoscopes, and plasma cancer treatment systems. Offers extended dynamic flow range, working pressure rating up to 0.8 MPa (8 bar / 112 psi), and compensated temperature range -10 to +55 °C. Designed for easy replacement of mechanical connectors; standard connectors are One-touch or BSPT 1/4"; other customized connectors available.

MF4700 (MF/FS4700)
The MF/FS4700 series uses proprietary MEMS calorimetric mass flow sensing technology with smart control electronics. Sensor surface is passivated with silicon nitride ceramic materials and coated with a water/oilproof nano-coating for enhanced performance and reliability. Meter body is made of aluminum alloy or stainless steel, compatible with most gas applications. Full-scale down to 10 sccm; extended dynamic flow range; working pressure rating up to 1.0 MPa; temperature range -10 to +55 °C.

MF5000
The MF5000 series uses proprietary MEMS mass flow sensing technology and innovative electronic circuitry to directly measure mass flow with very low pressure loss. Offers an expanded range of pipe diameters, ranges, and gas types. Applicable to industrial gas processes, control, laboratories, and test benches for hazardous zones (Ex ia IIC T4 Gb). Measurement range from 0.15 up to 800 SLPM. Connectors can be fully customized.

MF5100
The MF5100 series is designed for an extensive dynamic range (200:1) and high accuracy (1.5% reading) for flow metering and control applications. Uses proprietary MEMS mass flow sensing technology, automatically recognizes registered gases, and can operate on a lithium-ion battery for up to 5 years. Current models measure up to 100 SLPM. Connectors customizable.

MF5200
The MF5200 series is designed using Thermal-D MEMS thermal sensing technology, combining calorimetry and diffusivity sensing. Includes various wireless data options for plug-and-play IoT applications. Typical applications include hospital gases (air, oxygen, nitrogen, carbon dioxide, argon, nitrous oxide) and industrial gas processing. In addition to gas mass flow, the products can also offer gas pressure and gas temperature measurements.

MF5600
The MF5600 series is designed for general-purpose flow metering and control applications that require a detachable meter head for remote/distance data reading. Meters directly measure mass flow with minimal pressure loss. Applicable to hospital oxygen delivery management, industrial process monitoring, and gauging, as well as welding gas equipment and food and beverage processes. Measures up to 800 SLPM. Connectors customizable.

MF5700
The MF5700 series is designed for general-purpose flow metering and control with IoT or wired data options and a battery-powered option. Uses proprietary MEMS mass flow sensing technology and smart electronic circuitry, providing cost-effectiveness and minimal pressure loss. Suited for portable applications. Measures up to 500 SLPM. Mechanical connectors can be fully customized.

MF5900
The MF5900 series uses proprietary MEMS Thermal-D sensing technology and innovative electronic circuitry to measure mass flow while maintaining very high sensitivity at low flow rates, enabling selective measurement of gases without requiring gas-transfer data. Models support user-programmable functions and are applicable to low-flow natural gas and process metering. Can measure up to 5000 SLPM with a 2" pipe. Connectors customizable.

Caractéristiques / spécifications techniques

• Measurement type: direct mass flow measurement for various industrial and medical gases.
• Sensor technologies: MEMS calorimetric mass flow sensing; Thermal-D MEMS (calorimetry + diffusivity); proprietary MEMS sensing variants.
• Flow ranges: examples include full-scale down to 10 sccm (MF4700); 0.15–800 SLPM (MF5000); up to 100 SLPM (MF5100); up to 800 SLPM (MF5600); up to 500 SLPM (MF5700); up to 5000 SLPM with 2" pipe (MF5900).
• Dynamic range & accuracy: MF5100 example 200:1 dynamic range, 1.5% reading accuracy.
• Pressure ratings: up to 1.0 MPa (MF4700); up to 0.8 MPa / 8 bar / 112 psi (MF4000).
• Temperature range examples: -10 to +55 °C (MF4000, MF4700).
• Materials & coatings: meter body options aluminum alloy or stainless steel (MF4700); sensor passivation with silicon nitride and water/oilproof nano-coating.
• Connectors: standard options include BSPT 1/4"-male, BSPT 1/2"-female, One-touch; many series allow fully customized mechanical connectors.
• Special features: low pressure drop designs, detachable meter head for remote reading (MF5600), wireless/IoT data options (MF5200), battery operation (MF5100 up to ~5 years), hazardous-area suitability (MF5000 Ex ia IIC T4 Gb mention).