Multi-axis nanopositioning system SMARPOD 110.45

hexapodwith parallel kinematicsultra-high vacuum

The middle sized SMARPOD 110.45 is able to position payloads of up to 5 N with 6 DoF. The SMARPOD 110.45 is a mid-size hexapod-like positioning system. Because of its larger travel ranges it is extremely versatile. Optionally, the base plate can be equipped with mounting posts for tools, components or sensors, converting the positioning system to a core device for micro assembly and any other application involving precise alignment. Like other SmarAct SMARPOD's, the 110.45 is also available in a high vacuum and ultra-high vacuum version or made out of fully non-magnetic materials. Mechanical Travel [mm] - 20 (X); 20 (Y); 10 (Z) Travel [ - 21 (Θx); 24 (Θy); 38 (Θz) Max. Normal Force [N] - 5 Max. Horizontal Force [N] - 2.5 Dimensions [mm] - Ø 110 Height of Platform above Ground [mm] - 45 Weight [g] - 400 Closed-Loop Sensor Types - S; SC Smallest Increment [nm] - 1 Smallest Increment [µrad] - 1 Closed-Loop Repeatability, Full Stroke MCS2 [nm] - < ± 200 Closed-Loop Repeatability, 1 mm Travel MCS2 [nm] - < ± 10 Closed-Loop Repeatability, Full Stroke MCS2 [µrad] - < ± 15 Options Vacuum Options - HV (1E-6 mbar); UHV / UHVT (1E-11 mbar) Non-Magnetic Option - Yes (-NM)