Multi-axis nanopositioning system SMARPOD P-CLL-CLS

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The large-size SMARPOD utilizes three carriages of the CLL-series offering an extremely large travel range of 330 mm in X-direction. The SMARPOD P-CLL-CLS uses CLS positioners for the movement in the Y-direction and a CLL stage in the X-direction. Due to this specific combination of different linear stages, the P-CLL-CLS offers an extremely large travel range in the X-direction of up to 1200 mm on demand, while maintaining a small footprint in the Y-direction. The SMARPOD P-CLL-CLS is fully equipped with Exchangeable Drive Units (EDUs) guaranteeing an easy and fast exchange of the piezo drive without the necessity to fully disassemble the positioning system. Values for rotational travel are given for a pivot point at the surface of the top plate. The overall dimensions of the complete system may be larger for different poses. For more information, see the CAD model in the download area. The repeatability is measured about 20 mm above the top plate of each system, over the full travel range and for a single degree of freedom at a time. Values may be better for shorter travel ranges. Specifications Travel [ - 32 (Θx); 34 (Θy); 30 (Θz) Max. Normal Force [N] - 4 Max. Horizontal Force [N] - 2 Dimensions Base Plate [mm] - 554 x 45 Height of Platform above Ground [mm] - 72 Weight [g] - 2950 Closed-Loop Sensor Types - SC Smallest Increment [nm] - 1 Smallest Increment [µ - 3 Options Vacuum Options - HV (1E-6 mbar); UHV (1E-11 mbar)