Multi-axis nanopositioning system SMARPOD P-SLC-17
hexapodlinearrotary

Multi-axis nanopositioning system - SMARPOD P-SLC-17 - SmarAct GmbH - hexapod / linear / rotary
Multi-axis nanopositioning system - SMARPOD P-SLC-17 - SmarAct GmbH - hexapod / linear / rotary
Multi-axis nanopositioning system - SMARPOD P-SLC-17 - SmarAct GmbH - hexapod / linear / rotary - image - 2
Multi-axis nanopositioning system - SMARPOD P-SLC-17 - SmarAct GmbH - hexapod / linear / rotary - image - 3
Multi-axis nanopositioning system - SMARPOD P-SLC-17 - SmarAct GmbH - hexapod / linear / rotary - image - 4
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Characteristics

Number of axes
multi-axis
Features
hexapod, linear, rotary
Other characteristics
with parallel kinematics, ultra-high vacuum
Repeatability

50 nm

Stroke

10 mm, 30 mm, 50 mm
(0.39 in, 1.18 in, 1.97 in)

Description

This mid-size SMARPOD is based on SLC-17 stages in a parallel orientation offering a travel of 50 mm in X-direction. The SMARPOD P-SLC-17 can handle payloads of up to 5 N. It is based on a different mechanism than the circular SMARPODS. With nearly the same size, the P-SLC-17 offers a much larger travel of 50 mm in X-direction. Values for rotational travel are given for a pivot point at the surface of the top plate. The overall dimensions of the complete system may be larger for different poses. For more information, see the CAD model in the download area. The repeatability is measured about 20 mm above the top plate of each system, over the full travel range and for a single degree of freedom at a time. Values may be better for shorter travel ranges. For other sizes and travels, please feel free to contact us anytime. Specifications Travel [ - 25 (Θx); 22 (Θy); 16 (Θz) Max. Normal Force [N] - 5 Max. Horizontal Force [N] - 2.5 Dimensions [mm] - 110 x 70 Dimensions Base Plate [mm] - 110 x 70 Height of Platform above Ground [mm] - 67.4 Weight [g] - 680 Closed-Loop Sensor Types - SC Smallest Increment [nm] - 1 Smallest Increment [µ - 3 Uni-Directional Repeatability MCS2 [nm] - ± 50 Options Vacuum Options - HV (1E-6 mbar); UHV (1E-11 mbar) Non-Magnetic Option - Yes (-NM)

Catalogs

Other SmarAct GmbH products

Positioning Systems

*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.