Rotary stage MR-30028

closed-loopaluminumdirect-drive

The SMARSHIFT MR-30028 rotational stage is a large-area rotator with a diameter of 300 mm and a large aperture of 110 mm. It features high speed, high torque and long lifetime at uncompromising precision. Its compact footprint and low profile simplifies integration into existing systems and leaves enough space for your application. Applications The MR-30028 rotator has been specifically designed as a wafer rotation stage. As a platform for up to 300 mm (12") wafers, it can be used for metrology methods (such as reflectometry, reflecion spectroscopy, spectroscopic ellipsometry (VASE), and others) or for manufacturing (for wafer bonding, EUV lithography, and others). Additional application areas include optical alignment of heavier objects in photonics industry and astronomy. Specifications Max. Normal Force [N] - 1000 Dimensions [mm] - ⌀ 300 × 28 Weight [g] - 5000 Aperture [mm] - 110 Material Base Material - Aluminum, black anodized Open-loop Angular Velocity [°/s] - 540 - Closed-Loop Sensor Types - S Sensor Resolution [µ - <1 Angular Velocity [°/s] - 540