Recirculation chiller for the semiconductor industry Nikola series

water-cooledthermoelectric

SEMICONDUCTOR CHILLERS Nikola 3K/5K High capacity thermoelectric chillers for Plasma Etch and other Semi Applications Our highest capacity chillers designed specifically for semiconductor processing 3,000 or 5,000 watts of cooling capacity ±0.05°C Temperature Stability/repeatability Two pump options for flows up to 10 gpm and pressure up to 100+ psig Reduces wafer to wafer variations and eliminates first wafer effect Up to 80% more energy efficient than compressor-based chillers Uses thermoelectric technology for high reliability and reduced maintenance cost Modular design for easy maintenance Eliminates Freon and other harmful refrigerants to comply with new environmental regulations Uses less facility water and expensive coolants, such as Fluorinert or Galden Communication interfaces available for AMAT, LAM, TEL and Hitachi systems Universal power – plug in and go anywhere in the world An excellent solution for plasma etch, plasma ash, metrology, CMP and other processes