Water chiller ThermoRack 1801

compactthermoelectric

SEMICONDUCTOR CHILLERS ThermoRack 1801 Higher capacity rackmount chiller for Plasma Etch and other Semi Applications 1,800 watts of cooling capacity – 50% more capacity than ThermoRack 1201 in the same 5U rackmount enclosure ±0.05°C Temperature Stability/repeatability Operating range from -20°C to 70°C Designed for very fast response Available in standard high flow, medium flow and low flow configurations Reduces wafer to wafer variations and eliminates first wafer effect Up to 80% more energy efficient than compressor-based chillers Uses thermoelectric technology for high reliability and reduced maintenance cost Simple design – only 2 moving parts Eliminates Freon and other harmful refrigerants to comply with new environmental regulations Uses less facility water and expensive coolants, such as Fluorinert or Galden Compact size: Up to 6 TR1801 systems fit in the space of 1 compressor chiller Communication interfaces available for AMAT, LAM, TEL and Hitachi systems Universal power – plug in and go anywhere in the world An excellent solution for plasma etch, plasma ash, CMP and other processes