Water recirculation chiller ThermoRack 1201

for the semiconductor industrycompactrack-mount

ThermoRack 1201 is a 19" rack-mount thermoelectric recirculating chiller specifically designed for: semiconductor manufacturing plasma etch plasma ash solar and flat panel display manufacturing Operating Range: - -10°C to 80°C Ambient Temperature: - 10°C to 40°C non-condensing Stability / Repeatability: - ± 0.05°C at constant load (even near ambient) Cooling Capacity: - Up to 1340 Watts @ 20°C with 20°C facility water Heating Capacity: - Up to 2000 Watts @ 20°C with 20°C facility water Coolant / Process Fluid: - Glycol / water mix, Fluorinert / Galden or HFE Process Fluid Fittings: - 1/2" Swagelok Pump: - 14 lpm (3.7 gpm) @ 30 psig with HFE Tank Volume: - 5.7 liter (1.5 gal) with 2 level sensors Facility Water: - 4-19 lpm (1-5 gpm) @ 10-35°C filtered, treated recirculating facility cooling water Facility Water Fittings: - 1/2" Swagelok (316 stainless steel) N2/CDA (Optional): - 500 sccm -30°C dew point or lower CDA or N2, 30-60 psig (2-4 bar) for low temperature operation Wetted Materials: - Process: Aluminum, stainless steel and polymers Facility: Teflon impregnated anodized aluminum and stainless steel Size (W x D x H): - 19" x 24" x 8.7" 5U (48.3 x 61 x 22.1 cm) Weight: - 70 lbs (31 kg) Power Input: - 200-240 VAC 1 phase, 50/60 Hz, 10 amp max Circuit Breaker: - 16 amp 200-250 VAC 2-pole with 30 mA GFCI Remote EMO: - External dry contact Communications: - Lam analog, AMAT CHX and Tel Unity II Alarms: - Temperature, fluid level, system or component failure (display, dry contact and machine interface Standards: - Semi S2-0200, F47 compliant, CE, TUV listed to UL, CAN/CSA and EN 61010-1 Warranty: - 2 years