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Positioning hexapod PUNADCX-rayfor wafer inspection and metrology
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Characteristics
- Type
- positioning
- Motor type
- DC
- Applications
- for geometric alignments, for aerospace applications, for testing, for fiber optics, for robotics, X-ray, for laboratory applications, for medical applications, for optical applications, for the semiconductor industry, for wafer handling, for wafer inspection and metrology, optical beam
- Other characteristics
- compact, custom, precision, high-accuracy, high-resolution, for mirror, with controller, with parallel kinematics
- Payload capacity
Max.: 25 kg
(55.1 lb)Min.: 0 kg
(0 lb)- Linear stroke X
Max.: 30 mm
(1 in)Min.: -30 mm
(-1 in)- Linear stroke Y
Max.: 30 mm
(1.18 in)Min.: -30 mm
(-1.18 in)- Linear stroke Z
Max.: 20 mm
(0.79 in)Min.: -20 mm
(-0.79 in)- Angular stroke X
Max.: 11 °
Min.: -11 °
- Angular stroke Y
Max.: 11 °
Min.: -11 °
- Angular stroke Z
Max.: 20 °
Min.: -20 °
- Height
200 mm
(7.9 in)- Resolution
0.5 µm
- Repeatability
0.75 µm
- Speed
3 mm/s
Description
SIMPLE AND AFFORDABLE HEXAPOD
PUNA is a simple hexapod meeting precision positioning applications in research or industry with an optimized budget.
Indeed PUNA hexapod can meet limited budgets while offering a resolution of 0.5 µm in translation and 5 µrad (0.0003 °) in rotation for a payload capacity of 25 kg.
APPLICATIONS
► Aeronautics and space
► Instrumentation
► Automotive
► Optics
► Semiconductors
► Synchrotrons
► Test laboratories
VIDEO
Catalogs
Puna hexapod
2 Pages
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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.