HORIBA mass flow regulators

1 company | 7 products
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thermal mass flow controller
thermal mass flow controller
SEC-Z500X series

... is the changes can be made without removing the mass flow controller from the gas panel or piping. This reduces the number of spare mass flow controllers required; saving both time and ...

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HORIBA STEC
thermal mass flow controller
thermal mass flow controller
SEC-N100 series

... The SEC-N100 Series is suitable for a large variety of industries and applications. This mass flow controller can control a wide range of flows: from 10 SCCM to 1000 SLM. The SEC-N100 Series also has ...

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HORIBA STEC
thermal mass flow controller
thermal mass flow controller
SEC-8000F/D/E series

Flow rate: 3 l/min - 150 l/min
Pressure: 1 bar - 3 bar

... digital mass flow controller with a fairly high accuracy. This controller features an accuracy of ±1.0% S.P and can be operated in high temperatures. It is a clean gas supply unit that can be used for analysis of extremely small gas ...

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HORIBA STEC
thermal mass flow controller
thermal mass flow controller
SEC-Z700X series

Pressure: 1 bar - 3 bar

... chamber gas lines have a line regulator, pressure sensor and filter to avoid the mass flow controller crosstalk phenomenon caused by pressure fluctuations. The SEC-Z700X Series demonstrates high stability ...

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HORIBA STEC
thermal mass flow controller
thermal mass flow controller
LV-F series

Flow rate: 0 us gal/min - 100 us gal/min
Pressure: 1 bar - 3 bar

... micro-litre to ultra low flow rate control Enable precision flow control of low boiling point and high viscosity liquids Ultra clean. Measurement Techniques Cooling Measurement ...

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HORIBA STEC
mass flow regulator
mass flow regulator
GR-511F

Pressure: 3, 4 bar

... systems. FEATURES Pressure control with more stability and accuracy Mass flow sensor (Option) Compatible for various fitting RoHS compliance Application example In the below example, ...

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HORIBA STEC
mass flow controller
mass flow controller
SEC-E series

Flow rate: 0 l/min - 2 l/min

... purpose mass flow controller has a reliable thermal sensor and solenoid valve, allowing you to achieve high-level control of gas flow. A versatile component, the mass flow ...

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HORIBA STEC
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