HORIBA pneumatic flow regulators

1 company | 6 products
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thermal mass flow controller
thermal mass flow controller
SEC-Z500X series

... for digital mass flow controllers. It has multi-range/multi-gas functions enabling users to change the type of gas or full-scale flow rate on-site quickly and easily. With high accuracy +/- 1.0% S.P, piezo actuator ...

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HORIBA STEC
thermal mass flow controller
thermal mass flow controller
SEC-N100 series

... The SEC-N100 Series is suitable for a large variety of industries and applications. This mass flow controller can control a wide range of flows: from 10 SCCM to 1000 SLM. The SEC-N100 Series also has ...

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HORIBA STEC
thermal mass flow controller
thermal mass flow controller
SEC-8000F/D/E series

Flow rate: 3 l/min - 150 l/min
Pressure: 1 bar - 3 bar

... digital mass flow controller with a fairly high accuracy. This controller features an accuracy of ±1.0% S.P and can be operated in high temperatures. It is a clean gas supply unit that can be used for analysis of extremely small gas ...

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HORIBA STEC
thermal mass flow controller
thermal mass flow controller
SEC-Z700X series

Pressure: 1 bar - 3 bar

... chamber gas lines have a line regulator, pressure sensor and filter to avoid the mass flow controller crosstalk phenomenon caused by pressure fluctuations. The SEC-Z700X Series demonstrates high stability and controls ...

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HORIBA STEC
mass flow regulator
mass flow regulator
GR-511F

Pressure: 3, 4 bar

... The GR-511F can control gases used to cool the back side of wafers that are fixed in position by an electrostatic chuck system. The stability and accuracy of the GR-511F makes it ideal for controlling the flow of Helium ...

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HORIBA STEC
mass flow controller
mass flow controller
SEC-E series

Flow rate: 0 l/min - 2 l/min

... purpose mass flow controller has a reliable thermal sensor and solenoid valve, allowing you to achieve high-level control of gas flow. A versatile component, the mass flow controller ...

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HORIBA STEC
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