KLA automatic inspection systems

1 company | 6 products
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beam inspection system
beam inspection system
eSL10™

... The eSL10™ electron-beam (e-beam) patterned wafer defect inspection system leverages the industry’s highest landing energy and high resolution to capture small physical and high aspect ratio defects, supporting process ...

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KLA Corporation
optical inspection system
optical inspection system
Teron™ SL600

... design node IC technologies. Reticle data analytics system for IC fabs supports applications such as automatic defect classification, lithography plane review and defect progression monitoring. Inspection ...

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KLA Corporation
optical inspection system
optical inspection system
FlashScan®

... blank defect inspection system supports mask shops and blank manufacturers in meeting mask blank defect requirements for optical and EUV lithography applications. The FlashScan 211 system pairs its high ...

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KLA Corporation
3D inspection system
3D inspection system
Kronos™ 1190XR

... nuisance. The latest Kronos 1190XR system provides eXtended Range by handling a broader range of wafer thicknesses. Supporting bonded, thinned, warped and diced substrates, the system enables cost-effective defect inspection ...

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KLA Corporation
optical inspection system
optical inspection system
CIRCL™-AP

... provides production-proven process control and monitoring strategies for Cu-pillars, bumps, through silicon vias (TSVs), redistribution layer (RDL), hybrid bonding and other packaging process flows. The latest CIRCL-AP system ...

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KLA Corporation
optical inspection system
optical inspection system
ICOS™ T890

... Packaged IC Inspection and Metrology Systems The ICOS™ T890 component inspector provides high-performance, fully automated optical inspection of packaged integrated circuit (IC) components. ...

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KLA Corporation
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