KLA profilometers

1 company | 8 products
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3D profilometer
3D profilometer
Tencor™ P-7

... The Tencor P-7 benchtop stylus profiler builds on the success of the market leading Tencor P-17 benchtop stylus profiling system. It includes the superior measurement performance of the P-17 technology in a platform that offers a great ...

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KLA Corporation
optical profilometer
optical profilometer
Tencor™ P-17

... point-and-click stage controls, top and side view optics and a high-resolution camera with optical zoom. The Tencor P-17 stylus profilometer supports 2D or 3D measurements, with a variety of filtering, leveling and analysis algorithms ...

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KLA Corporation
3D profilometer
3D profilometer
Tencor™ P-170

... The Tencor P-170 is a cassette-to-cassette profiler featuring the P-17’s industry leading benchtop system measurement performance and the HRP®-260’s production proven handler. This combination provides a low cost of ownership solution ...

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KLA Corporation
3D profilometer
3D profilometer
HRP®-260

The HRP®-260 is a high-resolution, cassette-to-cassette stylus profiler. The HRP offers production proven performance with automated wafer handling capability serving the semiconductor, compound semiconductor, high brightness LED, data storage and related ...

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KLA Corporation
optical profilometer
optical profilometer
Zeta™-388

... The Zeta™-388 non-contact profiler provides 3D optical metrology and imaging capability, combined with an integrated isolation table and a cassette-to-cassette wafer handling system for fully automated measurements. The system is powered ...

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KLA Corporation
optical profilometer
optical profilometer
Alpha-Step® D-600

... The Alpha-Step D-600 stylus profiler supports 2D and 3D surface measurements of step heights and roughness, plus 2D bow and stress. The stylus profiler’s innovative optical lever sensor technology offers high resolution measurements, ...

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KLA Corporation
optical profilometer
optical profilometer
Alpha-Step D-500

... The Alpha-Step D-500 stylus profiler supports 2D measurements of step height, roughness, bow and stress. The innovative optical lever sensor technology offers high resolution measurements, large vertical range and low force measurement ...

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KLA Corporation
optical profilometer
optical profilometer
Zeta™-20

... The Zeta-20 benchtop optical profiler is a non-contact, 3D surface topography measurement system. The system is powered by patented ZDot™ technology and Multi-Mode optics, enabling measurement of a variety of samples: transparent and ...

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KLA Corporation
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