KLA stylus profilometers

1 company | 6 products
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3D profilometer
3D profilometer
Tencor™ P-7

... The Tencor P-7 benchtop stylus profiler builds on the success of the market leading Tencor P-17 benchtop stylus profiling system. It includes the superior measurement performance of the P-17 technology ...

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KLA Corporation
optical profilometer
optical profilometer
Tencor™ P-17

... -and-click stage controls, top and side view optics and a high-resolution camera with optical zoom. The Tencor P-17 stylus profilometer supports 2D or 3D measurements, with a variety of filtering, leveling and analysis ...

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KLA Corporation
3D profilometer
3D profilometer
Tencor™ P-170

... The Tencor P-170 is a cassette-to-cassette profiler featuring the P-17’s industry leading benchtop system measurement performance and the HRP®-260’s production proven handler. This combination provides a low cost of ownership solution ...

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KLA Corporation
3D profilometer
3D profilometer
HRP®-260

... The HRP®-260 is a high-resolution, cassette-to-cassette stylus profiler. The HRP offers production proven performance with automated wafer handling capability serving the semiconductor, compound semiconductor, high brightness LED, data ...

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KLA Corporation
optical profilometer
optical profilometer
Alpha-Step® D-600

... The Alpha-Step D-600 stylus profiler supports 2D and 3D surface measurements of step heights and roughness, plus 2D bow and stress. The stylus profiler’s innovative optical lever sensor technology offers ...

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KLA Corporation
optical profilometer
optical profilometer
Alpha-Step D-500

... distortion due to side view optics Arc Correction: Removes error due to arc motion of the stylus Compact Size: Smallest system footprint for a benchtop stylus profiler Software: User friendly ...

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KLA Corporation
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