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The FRT measuring systems series MFE (metrology front end) is
particularly suited to manufacturers of structured wafers, masks,
MEMS and similar products. Because of the very high cleanliness,
process and yield requirements, all tools are especially designed
for use in cleanrooms.
MFE systems measure critical dimensions and overlays on the
one hand and 3D topography or film thickness on the other.
All tools are metrological and comply with the necessary industry
standards such as the SECS II / GEM software interface.
Furthermore, the system is fully automated and equipped
with wafer cassettes and part carriers.
An EFEM and mini-environment for class 1 cleanrooms
rounds off the upper segment of the MFE tool series.
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Corning is a leading, global supplier of optical materials, high performance precision optics, optical-based metrology instruments and technical microlithography solutions for the semiconductor industry. Its core technical expertise includes fused silica and fluoride crystals, materials and processing, optical-based metrology instrumentation and high performance optics through Corning Tropel®.
Recognized world-wide in precision optical subsystems and advanced form metrology instrumentation, Corning Tropel provides rapid, accurate full-form measurement of precision flat and cylindrical surfaces for the semiconductor, data storage, automotive and industrial markets. Custom-designed, high performance precision optic components enable applications for wafer, photomask and inspection equipment suppliers, and are designed for systems from ultra-violet (UV) to near infrared (IR).
Advanced Metrology Research and Testing Exceeds Customer Expectation
Our commitment to semiconductor metrology research and testing is significant and addresses an industry-wide need for precise performance and predictability over the lifetime of materials. Corning’s advanced interferometry equipment enables precision measurements and quality assessments that meet and/or exceed customer requirements for quality products and solutions. Our world-class manufacturing facilities, leading-edge metrology equipment and in-house lens-making capabilities, continues to be known for the exceptional quality, performance and reliability of its precision optics
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Grinding relief quality measurement of threads and chamfers on taps:
The measuring device RELIEF EXPERT is designed for precise measurement of the grinding relief of threads and chamfers on almost all types of straight and spiral fluted workpieces.
- taps
- thread formers
- thread milling cutters
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Leica T-Probe is a “Walk-Around” armless wireless probing device for probing of hidden, hard-to-reach points and measuring of up to 9 cars in one setup with minimal setup times, sets new standards by increasing accuracy, offering a ten-fold increase in point acquisition rate and providing user-assignable multi-function buttons
Small, light, user-friendly, and more accurate than any other hand-held probe in the world, the Leica T-Probe gives you more than 6 Degrees of Freedom: It gives you the right way to measure. Now featuring longer styli, Leica T-Probe reaches up to 30m (98ft) in any dimension.
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Precision sensors for fast, accurate acquisition of component dimensions and surface data.
The world's leading range of touch-trigger and scanning measurement systems for co-ordinate measuring machines (CMMs), plus the revolutionary Renscan5%u2122 5-axis scanning technology.
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“Ultimate geometry“
The Multivision optical measurement system has the same functionality as a traditional profile projector, with the
added advantage that it instantly provides all measures in one go.
Multivision can be installed onto machines or used on benches in lieu of a profile projector.
For instance, when used on spring formers, where spring types vary considerably, Multivision will dramatically
improve the quality of production.
Multivision is ideal for three-dimensional measurements for:
Compression, torsion, and tensile springs as well as several templates
The instrument consists of:
•one computer box capable of controlling 1 to 3 cameras
•1 to 3 cameras
•1 to 3 illuminators (front or rear mounted for profile reading)
•harness for individual camera Start, sorter operation, correction communication (where possible), and machine stop.
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- Base MA 175
- Co-ordinate table MA 145-15, range 150 x 70 mm with quick approach and fine adjustment
- 2 scales Heidenhain
- Counter Quadra-Chek 100 with digital display
- Projector MA 240EG, screen Ø 150 mm
- Detachable incident light illuminator MA 213-13V-100W
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Werth profile- and measurement projectors allow rapid comparison of drawings in the workshop environment and secondly, with the aid of the Werth %u201DTastauge%u201D first proposed by Dr. Werth in 1977, they can be used for highly-accurate and fully-automatic measurements.
Minimal distortion in the image field and calibration corresponding to VDI/VDE 2617 and/or ISO 10360 guarantee corresponding trace-ability of measurement values to the linear
standard of the Physical Technical
Federal Institute (PTB).
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Digimatic Outside Micrometer:
- 1/1000 mm graduation, Standard model: waterproof type
- Measuring range: up to 300 mm
Soft Touch Micro:
- Variable measuring force type, optimal for measuring soft materials
- Two different measuring force types are available according to the purpose.
Quick Micro:
- 10 mm feed per thimble rotation
- Speedy measuring operation is possible.
Ratchet Thimble Micrometer:
Both speeder unit and thimble unit have a constant pressure mechanism.
- Stable measurement results are obtained with one-hand operation.
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- Capacity of 0-25mm
- Pearl chrome plated frame with insulation pads
- Tapered bow frame
- Hardened steel or tungsten carbide measuring faces
- 6.8mm spindle diameter
- Speeder' type ratchet
- Locking lever
- Choice of standard or vernier type sleeve
- Adjusting key
- Supplied complete with durable plastic pocket case
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TMI 49-60, 61, 62 and 63 Series Micrometers provide the precision necessary for the critical thickness measurement of numerous sheet materials.
APPLICATIONS
Films, Foils, Papers, Tissue, Corrugated, Paperboard, Carton board, Plastics, Rubber, Felt, Fiberboard
SPECIFICATIONS
* Meets ASTM D-645, D-374, TAPPI T-411, AS/NZ 1031, 426, 1031, 427, SCAN P7, DIN 53105, ISO 534
* Ranges of measurement:
49-60 series: 0-.050 × .00001 in.
49-61 series: 0-1.250 mm × .0005 mm
49-62 series: 0- 0.5 in. × .0001 in.
49-63 series: 0-12 mm × .001 mm . 76.20 mm (3 in.) throat depth
* Standard anvil diameter 16 mm. (0.63 in)
* Load: 7.3 psi (50.4 kPa)
FEATURES
* Digital display
* RS-232C output
* Motorized automatic cycling
* Standby feature
* Compatible with TMI's 49-66 Monitor/ MicrometerT for increased output capabilities
* Calibrated gauge blocks are available to meet your needs
INSTRUMENT SIZE
Depth: 305 mm (12 in.)
Height: 381 mm (15 in.)
Width: 279 mm (11 in.)
Weight 23.6 kg (52 lb)
Electrical: Specify voltage requirements when ordering
ORDERING INFORMATION
Catalog Number: 49-60
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Precision measurement requires the use of micrometers. In 1848, the first measuring tool of this type was patented by the French inventor Jean Laurent Palmer as «calibre à vis et à vernier circulaire» (screw calliper with a circular vernier). Today, we continue to
make external micrometers with these typical features.
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Micromar Waterproof Digital Micrometer 40 EW
Micromar 40 EW, the newest generation of waterproof digital micrometers ensures that even in the most difficult workshop conditions precise and reliable results are obtained
- Protected against water, oil and dust acroding to protection class IP65
- Reference-Lock-Function secures the zero position and prevents operation errors
- Chemical resistant material Ultradur for housing and buttons
- MarConnect data output, select either USB, OPTO RS232C or Digimatic
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The Starrett family of micrometers include a very broad range of products, from the 0-1" electronic or mechanical tools that are staples of every day shop use, to tools for highly specialized applications.
- Outside Micrometers
- Outside Micrometers Special Function
- Micrometer Heads
- Bench Micrometers
- Precision End Measuring Rods
- Inside Micrometers
- Depth Micrometers
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Technical caracteristics
DIN 863.
- Floating zero.
- Preset.
- Metric/inch units.
- MAX, MIN, MAX-MIN tolerances.
- RS 232 port.
- Design features :
- non-rotating setting rod.
- carbide anvil 8 mm.
- Battery life up to 2,000 hours.
- Accuracy 0.002 mm.
- Supplied with a FACOM certificate of conformity.
: 810 g.
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Micrometer Head MHC:
- Space-saving type that suppresses the entire length.
- Models with a measuring range of 6.5 mm and 13 mm
Micrometer Head MHS:
- Universal type with a measuring range of 13 mm
- Widely-used compact model
Micrometer Head MHA:
- Universal type with a measuring range of 13 mm
- Easy to adjust the zero point of the thimble.
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Micrometric head with hardened and ground 6 mm diameter screw. Contact surfaces in carbide. Manufactured as per DIN 863/1.
Supplied in case.
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MICI 80 / 180
motion up to 180 µm
high resonant frequency
parallelogram construction
additional mass up to 20 kg
applications:
quality control
automation
fine adjustment of optical components
mikro-assembly
This element was originally developed for quality control in the optical industry %u2013 it consists of a piezostage in combination with a micrometer drive.
The user can first adjust the position of the actuator and then fine-tune this position with the aid of the piezostage.
The resolution is in the nm and sub-nm range.
Because of the very robust construction of the element, an additional mass of up to 20 kg can be lifted.
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Automated version fitted with TESASTAR-m – Provides enhanced measuring
capabilities through the use of dedicated accessories such as the modular
probe changer.
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Features:
- Automatic, real-time target identification
- Track up to 512 targets
- Measure up to 4500 measurements per second
- Report in a fixed frame of reference or dynamically reference relative to other moving targets
Key Benefits:
- High speed 3D tracking of targets
- Real-time 6DOF tracking of multiple objects
- Measure dynamic behaviour of parts, structures, and assemblies
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ETA-ARC-AT: Capabilities and advantages
Cost reduction:
- Non-destructive measurement
- No roughening or blackening needed
- No witness piece required
- Measure the actual lens
- Contactless measurement -> no damage
Competitive advantage:
- 100% QC possible
- Check coating homogeneity
- Achieve perfect color matching
fore more information: www.get100.eu
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The FRT MicroGlider® is the highly precise, multi-sensor platform
measuring system from FRT intended for especially accurate
measuring applications. A linear motor driven, non-contact
air bearing x-y stage guarantees best precision motion during
stage movement. Hence the MicroGlider® measures profile,
topography, roughness, and coating thickness with further
enhanced accuracy. The MicroGlider® is also equipped
with a CCD camera for easy sample positioning and can
automatically perform predefined measurements.
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Description:
Nowadays, the properties of surface topographies are increasingly influenced by new processing methods and new materials.
The traditional profile stylus method is often not adequate to characterize the functional behavior of surfaces. Three-dimensional recording and evaluation are required. Soft and thin-walled materials also require non-contact measurement.
Moreover, ever higher levels of surface quality are being achieved, greatly increasing the requirements placed on measuring systems in terms of resolution and measuring accuracy.
The MarSurf WS 1 satisfies all these requirements:
- Vertical resolution 0.1 nm (.004 µin)
- Three-dimensional measurement and evaluation in only a few seconds
- Compact measuring station configuration for the workshop and laboratory
- MarSurf XT 20 software
- Topographical evaluation software on the fully standardized and powerful MarWin software platform
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On-line thickness measurement systems for:
* flat films and sheets, thermo-formed sheets made of PET, PVC, PUR, etc.
* coexruded film
* coated and uncoated rubber sheets
Thickness range: 10 µm ... 6 mm
Measuring uncertainty: 1 % of reading
The measuring system is unaffected by variations in density, humidity and colour of the material t be measured as well as unaffected by variations in temperature or vibrations of the surrounding fields.
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Scanning Frames are a critical factor in making a profile measurement. If the material is not presented to the sensor in an accurate and repeatable way, you will not be able to get the most accurate and repeatable measurement. This is why NDC places emphasis on engineering and producing the most accurate scanning frames in the industry. Our scanning frames' registration performance, coupled with our sensors' accuracy and repeatability, give you the most accurate profile measuring tool available.
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Optical Comparator Array
Each OPR5011 device is a hybrid sensor array that consists of three channels of the OPTEK OPC8332 differential optical comparator (‘TRI-DOC”) IC. The single chip construction ensures very tight dimensional tolerances between active areas.
Specifically designed for high-speed/high-resolution encoder applications, the open collector output switches based on the comparison of the input photodiode’s light current levels. Logarithmic amplification of the input signals facilitates operation over a wide range of light levels. The surface-mountable opaque polyimide package shields the photodiodes from stray light and can withstand multiple exposures to the most demanding soldering conditions, while the gold-plated wraparound contacts provide exceptional storage and wetting characteristics.
Features:
- Precise active area location
- Surface mountable
- TTL compatible output
- Wide supply voltage range
- Wide operating temperature range
Applications:
- High-speed applications
- High-resolution applications
- Applications requiring a wide range of light levels
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Features:
- 16"(400mm) Vertical screen for optimum viewin
- Erect profile image with fully corrected surface reflection image
- High resolution ground glass screen with calibration reticle, 90 degree cross lines and chart clips
- Machined chart ring with vernier protractor
- Electronic rotary screen protractor with selectable 1 minute or 1 /100 of a degree resolution
- Coated telecentric parfocal optics
- Quick change single lens mount
- Fiber optic surface illumination
- Integrated hood
- Nickel plated, completely cast iron workstage
.Triple axes solid crossed roller stage system
.Twin universal dovetails
.18" x 5" Overall size
.10" X Axis travel with "glide release"
.6" YAxis travel (rise a fall)
.110 lbs. Capacity
.±15 Degree true parfocal helix table adjustment with 5 minute vernier
- Available with 3 axes of measurement
- Optional 20" extended stage travel on "X" axis Available with internal or external edge sensing Optional swing away lamp house arm
- Optional motorized CNC full computer controlled readout systems
- 10X Lens system included
- NIST traceable calibration certificate
- 2 Year limited warranty
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Corning Tropel Corporation designed the UltraFlat 200 Mask System specifically for the photomask industry. It delivers the lowest measurement uncertainty for ever-tightening mask flatness specifications. Shrinking device features require not only flatter wafers, but flatter masks.
The UltraFlat system is used to measure flatness of photoblanks and photomasks throughout every stage of manufacturing and use, including, substrate polishing, coating and patterning to analyze film stress, and verification.
UltraFlat system utilizes near-normal incidence interferometry, rock solid structural design, state-of-the-art optical fabrication techniques and Tropel's renowned phase shifting analysis software to deliver 20 nanometer measurement uncertainty.
The system is NIST traceable and provides measurements that conform to SEMI standards. An automated photomask handling and measurement configuration is also available.
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Optical micrometers.
RF65X Series
Application domain
Laser micrometers are designed for non-contact measurement and control of position and dimensoins (diameter, thickness, gaps) of technological objects as well as for measuring levels of liquid and bulk materials .
RF651 model. Operating principle
The micrometer operation is based on the so-called shadow principle. The micrometer consists of two blocks transmitter, 1 and receiver, 2. Radiation of a semiconductor laser 3 is collimated by a lens 4. With an object, 5 placed in the collimated beam region, shadow image formed is scanned with a CCD photo-detector array 6. A processor 7 calculates the position (size) of the object from the position of shadow border (borders)
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The Optical Micrometer is a portable instrument capable of making non-contact depth measurements on virtually any surface, curved or flat. Available with either 100x or 200x magnification, an easy to read venier scale enables the operator to optically measure the difference in height of one surface to another; an optional reticle eyepiece allows width measurements. This instrument is useful for measuring depth of scratches, cracks, blind holes, dents, pits and other surface blemishes in all types of materials. For transparent materials (i.e. glass, acrylic), the optical micrometer can measure crazing, fractures, embedded voids and material thickness. Popular in the aircraft industry, the optical micrometer may be used in the field to measure surface features on windshields, leading edges, airframes, fuselage skin, propeller blades, rotor blades, coated surfaces, plus many more.
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Metrology equipment
