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- Unique Design: Both Piezo Stage and Piezo Actuator
- Frictionless Precision Flexure Guiding System
- 0.05 nm Resolution
- Direct Metrology with Capacitive Sensors for Highest Precision
- Ultra-Fast Response, Very Compact
- PICMA® High-Performance Piezo Drives
- ID-Chip for AutoCalibrate Function
- Vacuum Versions Available
The P-753 LISA (Linear Stage Actuators) high-speed piezo stage nanopositioners can be used both as linear actuators or as translation stages. They are equipped with capacitive feedback sensors, frictionless, flexure guiding systems and high-performance piezo drives providing a positioning and scanning range of up to 38 µm with very fast settling time and extremely low tip/tilt error.
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DSM's flexure-guided piezoelectric actuators and stages are linear actuators for precision motion control and positioning applications. Our piezo actuators can be custom designed for specific micropositioning, nanopositioning, and scanning application requirements including vacuum compatibility and non-magnetic environments.
The FlexFrame PiezoActuator™ product family uses solid-state flexures as pivot joints to provide smooth, stiction-free and backlash-free motion for critical positioning applications. FlexFrame products are lever mechanisms that mechanically amplify the output motion of piezoelectric elements. Piezo actuators require no lubrication, and because there are no internal components sliding on each other, there are no particulates generated from the actuator's motion.
The standard FPA series within the FlexFrame family offers linear travel ranges between 80µm and 2mm. The compact designs are well suited to many positioning applications and come standard in durable, non-corrosive stainless steel or titanium designs configured with mounting interfaces to match a customer’s requirements.
The actuator assemblies are mechanically preloaded to ensure bidirectional operation, thus providing increased resilience to mechanical loads when compared to non-preloaded actuators. The resulting mechanism provides high-stroke operation in an exceptionally small package.
We invite custom design inquiries. What "mission critical motion control" requirement can we help you with?
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- Compact Piezo Stage Design, only 44 x 44 x 44 mm
- 100 x 100 x 100 µm Travel Range
- 1 nm Resolution
- Ideal for Fiber-Alignment and Photonics Packaging Applications
- Optional E-760 Controller Card Features Built-In Optical Metrology
- Closed- and Open-Loop Versions
- Flexure-Guided Precision Trajectory Control
- Fast Scanning and Settling
- Large Variety of Controllers
The P-611 NanoCube® is a versatile, multi-axis piezo stage nanopositioning system. Its 100 x 100 x 100 µm positioning and scanning range comes in an extremely compact package of only 44 x 44 x 44 mm. Equipped with a zero-stiction, zero-friction guiding system, this NanoCube® provides motion with ultra-high resolution and settling times of only a few milliseconds. Open- and closed-loop versions are offered to fit your application.
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TRITOR series
highly compact design resulting in superior performance
accurate parallel motion through parallelogram design
high reliability due to solid state hinges
motion without mechanical play
high resolution in nm and sub-nm range
motion up to 400 µm
precision pin holes
applications:
optics, laser tuning, fiber positioning
micromanipulation, biology
scanning systems
vacuum and low temperature
The unique TRITOR elements are extremely compact but offer motions of up to 400 µm in all three axes. Parallel motion is achieved without mechanical play due to the mechanical design. As an option, integrated position control systems for overcoming the effect of hysteresis are available.
TRITOR elements can be easily combined with other mechanical positioning systems. They are well suited for many various applications reaching from optical research to OEM systems.
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Elliot GoldTM Series XYZ flexure stage fitted with piezo actuators providing 25 µm of piezo and 2mm of manual adjustment in each of the three axes. This system can be controlled either via a simple piezo controller or an Elliot Scientific Device Automated Alignment System (DALi2).
Ultra-stable patented* design XYZ flexure stage
Minimal arcuate displacement
XYZ Piezo adjusters
25 µm piezo adjustment travel
10 nm resolution
2mm coarse manual travel
Orthogonal alignment grooves
4.5kg load capacity
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The ATT185 series precision tilt (pitch-roll) tables provide a means for leveling instruments or tilting components over a ±10° range. Aerotech's patented sub-arc-second resolution drive allows the user to cover the total angular range quickly while maintaining a resolution of 0.2 arc-second for the ATT185-3, and 0.1 arc-second for the ATT185-5. With this unique drive, the tables exhibit virtually no creep or backlash and have excellent repeatability. These tables have a gimbal support with decoupled and orthogonal axial motion.
Both tilt table bases have clearance holes for M6 screws on 25 mm centers and are adaptable to Aerotech linear or rotary translation stages. The tables are constructed of aluminum with a black anodized finish.
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