A conductivity meter ideal for the concentration management of slurry, featuring a highly chemical resistant flat carbon sensor.
By maintaining the appropriate conductivity values, it contributes to the stabilization of slurry dilution levels and the polishing process of the wafer
High stability
Measurement ranges are 0−2,000 μS/cm and 0−10,000 μS/cm, with a repeatability of ±0.5% F/S and ±1.0% F/S, respectively, demonstrating high stability.
Metal contamination-free
With the use of a special carbon material as the electrode, there is no concern of metal contamination.
Concentration conversion function
Concentration conversion is possible by inputting the relationship between chemical concentration and conductivity along with temperature characteristics.