Concentration monitoring system CS-100

measurementchemicalcompact

A series of chemical concentration monitors for various chemicals used in the wet process. The optimal model to suit chemicals from among over 100 different applications can be chosen. Measurements of the concentration of each component can be taken in real-time, providing notifications using alarms to signal the timing of chemical exchange and automatic replenishment. Short measurement cycles to faithfully track concentration changes can be achieved. Real-time concentration tracking Achieve concentration management for a 300mm process with measurement cycles of approximately 3 seconds. Supports precise concentration management for various types of cleaning equipment Simple management Measurement is fully automated, without the need for manual control once the measurement has started. Users can achieve easy management by simply injecting the chemical. Furthermore, since reference spectrum measurements use air, water is not required as a utility for routine measurements. Prevention of bubbles A degassing function has been incorporated to separate bubbles from liquids just before the flow cell. Possible to take continuous measurements while the liquid is flowing.