Concentration measuring device CS-900F

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Product overview
Non-contact, stable concentration measurement for semiconductor process chemicals. The CS-900F uses a non-contact, fiber-optic cell unit mounted on piping, minimizing leakage and contamination risk. It supports a broader range of wet-process chemicals and enables direct measurement of high-temperature solutions up to 80°C without pre-treatment, improving operational stability and versatility as the CS Series flagship.

Key features

• Compact design with stable measurement performance: fiber-optic cables reduce cell-unit volume inside equipment by approximately 60% compared with previous models, lowering sensitivity to external disturbances.
• Expanded chemical compatibility: wavelength range increased approximately threefold versus previous models, enabling measurement of a wider variety of process chemicals; direct measurement up to 80°C supports safer operation.
• Safety and process optimization: cell unit mounts on piping for non-contact measurement, reducing leak and contamination risks and helping to minimize chemical consumption.
• Interfaces and functions: 24 V DC power, transmission output, contact output, RS-232C communication; supports multi-component measurement and temperature-compensated multivariate analysis.

Specifications
Product name: Fiber-Optic Type Non-Contact Chemical Concentration Monitor
Model: CS-900F
Measurement principle: Absorption spectroscopy
Calculation method: Temperature-compensated multivariate analysis

Measurement range and repeatability (mass%)

• Model: CS-900F-1-1-1P-1P25P5-AA
  Component: NH3 — Range: 0.00 to 1.20 — Repeatability: ±0.05 — Analog output range: 0.00 to 10.00
  Component: H2O2 — Range: 0.00 to 5.50 — Repeatability: ±0.10 — Analog output range: 0.00 to 10.00
  Component: H2O — Range: 93.3 to 100.0 — Repeatability: ±1.0 — Analog output range: —
• Model: CS-900F-1-1-1P-P8P8-11
  Component: NH3 — Range: 0.00 to 0.80 — Repeatability: ±0.03 — Analog output range: 0.00 to 1.00
  Component: H2O2 — Range: 0.00 to 0.80 — Repeatability: ±0.03 — Analog output range: 0.00 to 1.00
  Component: H2O — Range: 98.4 to 100.0 — Repeatability: ±0.2 — Analog output range: —

Measurement conditions
Measurement interval: approx. 5 s
Moving average: 16 times

Tubing and installation
PFA tubing: 1 inch or 3/4 inch (avoid the black anti-static section). Pipe surface must be free of scratches, dents and cloudiness. Mount cell unit on piping; maintain installation angle of main unit within ±1°.

Sample conditions
Sample temperature: 20 to 80 °C
Atmospheric/sample temperature fluctuation: ±1 °C over 1 hour
Sample pressure: < 0.4 MPa (G); pressure fluctuation within 0.02 MPa. Avoid air bubbles in sample flow; if measurement pressure differs from background correction, perform zero-point correction.

Power and physical data
Power supply: 24 V DC
Power consumption: approx. 40 W (excluding startup inrush)
Weight: Main unit approx. 5.8 kg; Cell unit approx. 1.4 kg
Dimensions: Main unit 217 (W) × 290 (D) × 173 (H) mm (excluding projections); Cell unit 186 (W) × 142 (D) × 83 (H) mm (excluding projections)
Expected light source life: 5 years
Fiber-optic cable: standard length 5 m; bend radius R150 mm