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Concentration monitoring system CS-700
measurementchemicalspectroscopic

Concentration monitoring system - CS-700  - HORIBA STEC - measurement / chemical / spectroscopic
Concentration monitoring system - CS-700  - HORIBA STEC - measurement / chemical / spectroscopic
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Characteristics

Type
concentration
Applications
measurement, chemical
Technology
spectroscopic
Other characteristics
high-performance

Description

This is a chemical concentration monitor capable of accurately measuring the concentration of each component in mixed solutions used in the semiconductor manufacturing processes. Ideal for controlling multi-component chemicals, including trademarked chemicals. It contributes to enhanced quality control in semiconductor manufacturing processes while improving the accuracy of chemical management. Compatible with multi-component chemicals Accurate measure mixtures of up to eight components of chemicals can be taken. Zero reagent requirements Since component separation is accomplished through an optical measurement method without the need for reagents, it also contributes to cost reduction in the production process. Conditions of measurement 1) Measurement interval: approx. 8 sec. 2) Moving average time :10 times 3) Atmospheric temperature, chemical temperature fluctuation: within +/- 1 degree C (period of time: 1hour). Sudden temperature change should be avoided 4) Condition of sample temperature: 20 to 30 degree C Repeatability is the maximum deviation from average measured value over a 1 hour continuous measurement period. The values in the above table are assigned analog output values between 4 - 20 mA. (makimum resistance of 500Ω)

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