Thermal flow sensor SFS01-M-01000

siliconmassgas

Overview
Thermal mass flow module with linearized digital and analog outputs, designed for fast, compact integration in gas dosing systems, manifolds and analysers. Evaluation Kit includes a fluidic block adapter for direct tube attachment and exchangeable M5-4 connectors for 4 mm tubing.

Product identification

• Product Name: SFS01-M-01000
• Product code: 156602

Key features

• Operating flow range: ±1000 sccm (ml/min)
• Measured medium: Gas flow
• Operating temperature range: 0 to 80 °C
• Housing material: Aluminum, FR4
• Fluidic connection: M5-4 mm tube adapter or Ø 2.2 mm I.D. flat gasket (without fluidic block)
• Flow channel inner diameter: 2.2 mm
• Wetted materials: Aluminum, gold, FR4, silicon, silicon nitride, epoxy, nitrile, brass
• Connection type: PCB connector JST SM08B-SRSS-TB
• Response time t63: 20 ms
• Output signal: I2C or 0 to 1 V (analog)
• Accuracy: 2% f.s. (digital output)
• Repeatability: 0.2% f.s.

Technical specifications

• Product Name: SFS01-M-01000
• Product code: 156602
• Operating flow range: ±1000 sccm
• Flow channel inner dimensions: 2.2 mm
• Response time t63: 20 ms
• Output: I2C or 0–1 V
• Accuracy: 2% f.s.
• Repeatability: 0.2% f.s.
• Operating temperature: 0–80 °C