Thermal flow sensor SFS01-M-00200

massgascompact

Overview
Thermal mass flow module with linearized digital and analog outputs, designed for gas dosing systems, manifolds and analysers. Compact and fast-response device supplied as an Evaluation Kit with a fluidic block adapter for direct tube attachment.

Product identification

• Product name: SFS01-M-00200
• Product code: 156603

Key features

• Operating flow range: ±200 sccm (ml/min)
• Measured medium: Gas flow
• Operating temperature range: 0 to 80 °C
• Response time t63: 20 ms
• Output signal: I2C (digital) or 0 to 1 V (analog)
• Supply voltage: 5 V DC ±5%
• Accuracy: 2% f.s. (digital output)
• Repeatability: 0.2% f.s.
• Includes: Evaluation Kit with fluidic block adapter and M5-4 connectors for 4 mm tubing (exchangeable)

Technical specifications

• Housing material: Aluminum, FR4
• Fluidic connection: M5-4 mm tube adapter or Ø 2.2 mm I.D. flat gasket (without fluidic block)
• Flow channel inner dimensions: 2.2 mm
• Wetted materials: Aluminum, gold, FR4, silicon, silicon nitride, epoxy, nitrile, brass
• Connection type: PCB connector JST SM08B-SRSS-TB