Gas delivery system JW-200-VMB

compressed airfor industrial applications

Valve Manifold Box and Panel Gas Cabinet (VMB/VMP)

Overview
VMBs (Valve Manifold Boxes) and VMPs (Valve Manifold Panels) are modular components for controlled distribution of high‑purity and specialty gases in industrial environments. They split a single gas supply into multiple outlets (typically 4–8 sticks) and are designed for safe operation and maintenance when handling hazardous, reactive or ultra‑high‑purity gases in semiconductor fabs, laboratories and specialty gas distribution systems.

Features and Applications

• Configurations: enclosed gas cabinet for hazardous/reactive gases or open panel for inert gases.
• Control options: manual stations to fully automated PLC integration.
• Safety systems: vent/purge, vacuum generation, UV/IR detection, toxic gas monitors, emergency shut‑off valves, explosion‑proof cabinets and self‑locking doors.
• High‑purity construction: orbital‑welded manifolds, purgeable housings and materials compatible with semiconductor‑grade gases.
• Specialized cabinets: TMA cabinets for pyrophoric/highly reactive gases with sprinkler, leak detection and dedicated exhaust.
• Scrubber tail gas treatment cabinets: chemical scrubbing and filtration for neutralization of hazardous byproducts and environmental compliance.
• Typical use cases: semiconductor fabs, bulk specialty gas delivery, atomic layer deposition (ALD), research laboratories and gas service skids.

Technical Data
Model: JW-200-VMB, JW-100-VMB
Specification: 4S / 6S / 8S
Special gas cabinet size: W870×D340×H1680
Control cabinet power supply: 220VAC, 50Hz, 500W
Heating power supply: 220VAC, 50Hz, 1–6kW
Purge: PN2, 1/4” MVCJ
Vacuum: GN2, 1/4” MVCJ
VENT drain pipe: 1/2” MVCJ
Pneumatic air source: CDA driver, 1/4" SWG
Cabinet ventilation: OD 100mm, 70 m3/hr
Standard equipment: explosion‑proof cabinet, explosion‑proof self‑locking door, explosion‑proof observation window, remote cut‑off
Operation interface: 7" color touch screen

Optional

• UV/IR sensors
• Panel heating
• Ethernet communication module
• High‑temperature switch
• Smoke sensor

Supported gases (examples)
SiH4, NF3, NH3, N2O, HCl (selection depends on cabinet configuration and wetted materials)

Technical specifications

• Brand: Jewellok
• Models: JW-200-VMB, JW-100-VMB
• Number of outlets / sticks: 4S / 6S / 8S
• Special cabinet size: W870×D340×H1680
• Control cabinet power: 220VAC, 50Hz, 500W
• Heating power: 220VAC, 50Hz, 1–6kW
• Purge system: PN2, 1/4” MVCJ
• Vacuum system: GN2, 1/4” MVCJ
• VENT drain pipe: 1/2” MVCJ
• Pneumatic air source: CDA driver, 1/4" SWG
• Cabinet ventilation: OD 100mm, 70 m3/hr
• Standard equipment: explosion‑proof cabinet, explosion‑proof self‑locking door, explosion‑proof observation window, remote cut‑off
• Operator interface: 7" color touch screen
• Available options: UV/IR detection, panel heating, Ethernet module, high‑temperature switch, smoke detector
• Typical applications: high‑purity gas distribution, TMA reactive gas cabinets, BSGS high‑flow systems and scrubber tail gas treatment