XYZ positioning system 782300:265.26

linearfor wafer inspection and metrologyfor the semiconductor industry

Highly stable non-contact optical measurement. This XY combination has a separate Z-vertical unit to mount a custom microscope, camera or sensor. The KT310 cross-stage with stepper motor on the granite plate moves the wafer under inspection to the microscope with high precision and enables stable and high-resolution imaging. Its concept with internal motors, cross roller guides and high-precision ball screws enables outstanding precision with optimum use of the installation space. High-precision analysis of the smallest details • Ideal for optical inspection of wafers, printed circuit boards and probe cards • Easily apaptable to various custom microscopes, cameras or senors • High precision surface inspection of wafers up to 200 x 200 mm • Low maintenance and with optimized price-performance ratio due to stepper motor drive Optional extensions: • Other travels and lengths • With/without frame and base plate made of granite or aluminum • Versions ISO 14644-1 (up to class 1 on request) e.g. with enclosure and with exhaust system • Individual solutions for cable routing • Adapted vibration decoupling by means of damping rubber layer or pneumatic dampers • Integration into the customer-specific overall application