XYZ positioning system 782498:001.26

linearautomaticfor the semiconductor industry

XYZ Inspection gantry for semiconductors | XY Linear motor, profile rail | Z Ball screw, AC servo - Inspection and Mikroscopy High precision automatic 3D inspection of semiconductors This 3-axis positioning system moves a high-resolution camera or sensor on the Z-axis over the target. Based on the LA250 linear axis with linear direct drive, this system achieves high speeds and accelerations with high precision and very good reproducibility. For vertical positioning, the high-precision PLT165-AC linear stage with a powerful AC servo motor is used to drive its precision ball screw. It has a high payload capacity, even for heavy sensors. High throughput in low-maintenance 24/7 operation • Ideal for automated inspection of large, flat samples e.g. wafers, probe cards by means of travel bridge • Very long travel of 700 x 700 x 200 mm for loads up to 15 kg • High precision measurement with repeatability up to 0.3 µm • Highest stability for high magnification measurements Optionally expandable: • Various travels up to 2000 mm • Control in Z manual or motorized • With/without frame and base plate made of granite or aluminum • ISO 14644-1 versions (up to class 1 on request) • Optional with pre-configured controller incl. exemplary software for immediate use