Temperature testing machine SI CHIP-AA-10

couplingautomatedindustrial

SI CHIP-AA-10 is a coupling test system developed for SI CHIP coupling verification and designed for industrial-scale mass production. It delivers precise, repeatable coupling and test operations by integrating automated subsystems for motion, temperature control, vision guidance and force feedback.

Main functions and design highlights

• Independent 6-axis high-precision coupling system supporting accurate positioning and coupling procedures.
• Stage high-precision temperature control with integrated TEC and chiller for chip thermal management.
• High-accuracy vision guidance and force-feedback system enabling real-time pressure monitoring at the chip interface.
• Automated power supply, automatic feeding, zoned unloading and wafer cassette auto-feed for industrial mass production.
• Independent vibration isolation for coupling/test area and loading area; coupling zone equipped with precision granite and air-bearing isolation for enhanced stability.
• High compatibility: adaptable to different models via changeable fixtures and corresponding software.

Product highlights

• Fully automated
• High compatibility
• High resolution (0.05 μm coupling resolution)

Application fields

• Optoelectronics
• Power devices
• Microwave/RF components
• New energy vehicles

Technical specifications

• Model: SI CHIP-AA-10
• Coupling process: SI CHIP coupling test
• Coupling method: micro-motion with instrument display, supported by coupling algorithms
• Coupling resolution: 0.05 μm
• Force control range: 10 g – 3000 g
• Equipment weight: approx. 850 kg
• Chip temperature control: TEC + chiller
• Power and probes: chip vacuum adsorption + automatic probe power
• Feeding and storage: wafer cassette auto-feed + zoned chip storage
• Vibration design: independent isolation for coupling/test area and loading area; coupling zone uses precision granite and air-bearing isolation