Scanning electron microscope Verios 5 XHR

metrologyfor materials researchfor semiconductors

Scanning electron microscopy characterization of nanomaterials with sub-nanometer resolution and high material contrast. Verios 5 XHR Scanning Electron Microscope The Verios 5 XHR SEM offers subnanometer resolution over the full 1 keV to 30 keV energy range with excellent materials contrast. Unprecedented levels of automation and ease-of-use make this performance accessible to users of any experience level. Scanning electron microscopy characterization • High resolution nanomaterial imaging with the UC+ monochromated electron source for sub-nanometer performance from 1-30 kV. • High contrast on sensitive materials with excellent performance down to 20 eV landing energy and high-sensitivity in-column and below-the-lens detectors and signal filtering for low-dose operation and optimal contrast selection. • Greatly reduced time to nanoscale information for users with any experience level using the Elstar electron column featuring SmartAlign and FLASH technologies. • Consistent measurement results with ConstantPower lenses, electrostatic scanning and a choice of two piezoelectric stages. • Flexibility for accessories with a large chamber. • Unattended SEM operation with Thermo Scientific AutoScript 4 Software, an optional Python-based application programming interface.  SmartAlign technology SmartAlign technology eliminates the need for any user alignments of the electron column, which not only minimizes maintenance, but also increases your productivity.