- Hydraulics - Pneumatics
- Valve
- Butterfly valve
- VAT Vakuumventile AG
Pressure-control valve 612 seriesbutterflyelectrically-actuatedwith ISO flange connections
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Characteristics
- Type
- butterfly
- Operation
- electrically-actuated
- Function
- pressure-control
- Body
- with ISO flange connections
- Applications
- for the semiconductor industry
- Material
- anodized aluminum, stainless steel
- Other characteristics
- ISO, with stepper motor
- DN
Min.: 25 mm
(0.984 in)Max.: 320 mm
(12.598 in)- Pressure
Min.: 75 mbar
(1.1 psi)Max.: 1,000 mbar
(14.5 psi)- Temperature
Min.: 35 °C
(95 °F)Max.: 150 °C
(302 °F)- Flow rate
Min.: 6 l/s
(1.59 us gal/s)Max.: 27,000 l/s
(7,132.65 us gal/s)
Description
Field of application: Semiconductors, FPD / CVD systems and industrial processes.
Catalogs
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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.