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... The MV-2000 Series achieves stable vaporization, even at low temperatures, using the new tornado flow method. This is suitable for vaporization a range of liquids even challenging sources such as "High-k", a liquid source which is pyrolyzed easily. Stable ...
HORIBA STEC
HORIBA's best-selling baking system has been developed to meet the requirements of today’s high technology industries. Without the need of a carrier gas, the system can provide stable vaporization of materials such as TEOS (at a rate of 600 SCCM) and ...
HORIBA STEC
... The VC Series is able to rapidly vaporize pure water or other liquid sources without carrier gas, which enables you to construct a more compact vaporization system. HORIBA can provide you with a custom-made vaporization system consisting of this VC Series ...
HORIBA STEC
... The LU Series offers uninterrupted, safe and reliable delivery of the liquid precursor to liquid material baking systems and injection systems. This leads to increased uptime, reduced operator handling and reduced risk of process contamination. The LU ...
HORIBA STEC
... This mixed injection system can rapidly vaporize a wide variety of liquid sources by using the gas-liquid mixture vaporization method. This method allows for the stable vaporization of high boiling point liquids. Features The gas-liquid mixture ...
HORIBA STEC
The Metal-Organic Chemical Vapor Deposition (MOCVD) process is widely used in the manufacture of LEDs, optical devices and other components. Liquid and solid precursors are delivered to the reaction chamber by controlling the temperature, pressure and ...
HORIBA STEC