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Stroke : 50 µm - 240 µm
Repeatability: 5, 10 nm
... Metrology • Interferometry • Photonics / integrated optics • Lithography • Nanopositioning • Scanning microscopy • Sample alignment • Micromachining Subnanometer resolution with capacitive sensors Capacitive sensors measure ...
Physik Instrumente
Stroke : 32 mm
... • Only 32 mm in width and 8 mm in height • Direct position measurement with incremental encoder with 0.75 µrad resolution • Up to 3 µrad minimum incremental motion • Rotation range >360° • Velocity 45 °/s Product Description Piezo inertia drives ...
Physik Instrumente
... low-profile rotation stages of the PIglide RL series are designed for the highest precision with low-profile design. Various options can be combined to create a solution ideal for point-to-point indexing or constant velocity scanning. ...
Physik Instrumente
... travel range in both directions of rotation. Noncontact reference switch. Compact multi-axis positioning systems possible with L-511 linear stages and L-310 Z stages. Vacuum-compatible product variants ...
Physik Instrumente
... 300 nm Product overview The directly driven rotation stages of the PIglide RLA series are designed for ultra-high precision. They have a low profile and a large clear aperture. The RLA stages offer a superior travel ...
Physik Instrumente
... 10-7 hPa Unlimited travel range Repeatability to 87 µrad 20 mm Ø aperture Reference switch Standard-class rotation stage Worm drive. Aperture with 20 mm Ø. Reference switch. Reduced outgassing especially for use in vacuum ...
Physik Instrumente
Stroke : 5, 2.5 mm
Speed: 200 mm/s
Repeatability: 0.25 mm
... cabling of the Z stage with applied servo tuning optimization and under applied load. You receive a complete, ready-to-use positioning system. Accessories and options Air filter sets Application fields The ...
Physik Instrumente