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Digital thermal mass flow controller for corrosive gases
PFC-60 πMFC MKS Instruments

  • digital thermal mass flow controller for corrosive gases PFC-60 πMFC MKS Instruments
The next generation MKS πMFC (piMFC) mass flow controller includes technology improvements in functionality and performance to help users in semiconductor and high purity thin-film applications increase tool throughput. Real-time accurate flow control that is insensitive to upstream and downstream pressure disturbances is provided through advanced digital algorithms. Enabling real-time control of process gas flow, accuracy is significantly improved over conventional PID based digital MFCs, resulting in better chamber matching.

The integrated pressure sensor and local LED display help to reduce the number of components required in a gas stick. A web based browser interface allows for setup and troubleshooting of MFC's in-situ, thereby reducing the number of "No Problem Found" MFC replacements and the need to break the process gas line.

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