thermal mass flow controller / for gas
Min.: 0 l/h (0 us gal/h)
Max.: 3,000 l/h (793 us gal/h)
The GM50A digitally-controlled mass flow controller is available with either RS485, Profibus™, EtherCAT, or DeviceNet™ I/O. The digital control electronics utilize the latest MKS control algorithms for fast and repeatable response to setpoint throughout the device control range. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of setpoint accuracy on the calibration gas. I/O protocols are designed to allow the GE50A to easily replace RS485 and DeviceNet versions of the MKS 1479A MFC with minor coding.
A standard 3-inch footprint enables its use without modifying existing gas line configurations. The GM50A mass flow controller has an electropolished surface finish (the GM50A mass flow meter is not electropolished).