thermal mass flow controller / for gas / analog
179A Mass-Flo® MKS Instruments



  • Technology:

    thermal mass

  • Fluid:

    for gas

  • Other characteristics:


  • Flow rate:

    Max.: 1,200 l/h (317 us gal/h)

    Min.: 1 l/h (0 us gal/h)

  • Pressure:

    500 psi


The 179A MASS-FLO® is an analog/digital, metal-sealed mass flow meter. It is made to measure the flow of gases in a wide range of applications. It is available in both analog and digital models with 1% accuracy. It is made up of 316L stainless steel finished less than 32 micro-inches Ra.

The normal operating temperature range is from 0 °C up to 50 °C while its nominal operating pressure range from 10 to 20000 sccm 10 Torr . Its output signal ranges from 0 to 5 V DC.