thermal mass flow controller / for sour gas / digital
P2 MFC MKS Instruments



  • Technology:

    thermal mass

  • Fluid:

    for sour gas

  • Other characteristics:


  • Flow rate:

    Min.: 0 l/h (0 us gal/h)

    Max.: 1 l/h (0 us gal/h)

  • Pressure:

    Min.: 4 Torr (0 psi)

    Max.: 1,200 Torr (23 psi)


The PFC-60 ΠMFC, manufactured by MKS Instruments, is a digital thermal mass flow controller especially used for corrosive gases. The device consist of improvement in the technology in terms of functionality and performance. They help the users in semiconductor and high purity thin-film applications. The flow control of the device is insensitive to upstream and downstream disturbances. The real-time control of the gas flow and its accuracy is improved. They have better chamber matching than PID based digital MFCs. The pressure sensor and LED display is combined in order to lessen the components needed in a gas stick. The set-up and troubleshooting of the MFC's in-situ is due to the web based browser interface.