Isolation valve 150 series
gatepneumatically-operatedvacuum

Isolation valve - 150 series - VAT Vakuumventile AG - gate / pneumatically-operated / vacuum
Isolation valve - 150 series - VAT Vakuumventile AG - gate / pneumatically-operated / vacuum
Isolation valve - 150 series - VAT Vakuumventile AG - gate / pneumatically-operated / vacuum - image - 2
Isolation valve - 150 series - VAT Vakuumventile AG - gate / pneumatically-operated / vacuum - image - 3
Isolation valve - 150 series - VAT Vakuumventile AG - gate / pneumatically-operated / vacuum - image - 4
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Characteristics

Type
gate
Operation
pneumatically-operated
Function
isolation
Applications
vacuum, for the semiconductor industry
Material
aluminum
Other characteristics
double-acting, for corrosive fluids
DN

63 mm, 100 mm, 160 mm, 200 mm, 250 mm
(2.48 in, 3.937 in, 6.299 in, 7.874 in, 9.843 in)

Pressure

Min.: 4 bar
(58 psi)

Max.: 7 bar
(101.5 psi)

Temperature

Min.: 50 °C
(122 °F)

Max.: 250 °C
(482 °F)

Description

For applications where low particle count and low shock impact are a must. Often used in R&D, but also in semiconductor process systems.

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.