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Ultra high vaccum valve 010 series
gatemanualpneumatic

ultra high vaccum valve
ultra high vaccum valve
ultra high vaccum valve
ultra high vaccum valve
ultra high vaccum valve
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Characteristics

Type
gate
Operation
manual, pneumatic
Function
isolation
Body
miniature, stainless steel
Applications
for industrial applications, for ultra high vaccum, for the semiconductor industry
Other characteristics
compact, single-acting, double-acting
Temperature

50 °C, 80 °C, 200 °C, 250 °C (122 °F)

Pressure

Max.: 7 bar (101.5 psi)

Min.: 5 bar (72.5 psi)

DN

16 mm, 25 mm, 40 mm, 50 mm (0.63 in)

Description

The compact mini UHV gate valve featuring a modular actuator concept is well suited for industrial and R&D applications. It is often used in pipings of semiconductor process systems.

Catalogs

*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.