for industrial applications, for ultra high vaccum, for the semiconductor industry
Other characteristics
compact, single-acting, double-acting
Temperature
50 °C, 80 °C, 200 °C, 250 °C (122 °F)
Pressure
Max.: 7 bar (101.5 psi)
Min.: 5 bar (72.5 psi)
DN
16 mm, 25 mm, 40 mm, 50 mm (0.63 in)
Description
The compact mini UHV gate valve featuring a modular actuator concept is well suited for industrial and R&D applications. It is often used in pipings of semiconductor process systems.
*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.