- Hydraulics - Pneumatics
- Valve
- Gate valve
- VAT Vakuumventile AG
Gate valve 162 seriespneumatically-operatedshut-offfor the semiconductor industry
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Characteristics
- Type
- gate
- Operation
- pneumatically-operated
- Function
- shut-off
- Applications
- for the semiconductor industry
- Material
- anodized aluminum
- Other characteristics
- compact, normally closed, single-acting, for corrosive fluids
- DN
Max.: 500 mm
(19.685 in)Min.: 200 mm
(7.874 in)- Pressure
Max.: 7 bar
(101.5 psi)Min.: 5 bar
(72.5 psi)- Temperature
50 °C, 80 °C, 120 °C
(122 °F, 176 °F, 248 °F)- Flow rate
Max.: 101,500 l/s
(26,813.46 us gal/s)Min.: 11,000 l/s
(2,905.89 us gal/s)
Description
For demanding semiconductor processes such as CVD and ETCH.
Catalogs
No catalogs are available for this product.
See all of VAT Vakuumventile AG‘s catalogsOther VAT Vakuumventile AG products
Gate valves, pendulum valves, Butterfly valves
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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.