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Gate valve 162 seriespneumatically-operatedshut-offanodized aluminum
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Characteristics
- Type
- gate
- Operation
- pneumatically-operated
- Function
- shut-off
- Body
- anodized aluminum
- Applications
- for the semiconductor industry
- Other characteristics
- compact, normally closed, single-acting, for corrosive fluids
- DN
Min.: 200 mm
(7.874 in)Max.: 500 mm
(19.685 in)- Pressure
Min.: 5 bar
(72.5 psi)Max.: 7 bar
(101.5 psi)- Temperature
50 °C, 80 °C, 120 °C
(122 °F, 176 °F, 248 °F)- Flow rate
Min.: 11,000 l/s
(2,905.89 us gal/s)Max.: 101,500 l/s
(26,813.46 us gal/s)
Description
For demanding semiconductor processes such as CVD and ETCH.
Catalogs
No catalogs are available for this product.
See all of VAT Vakuumventile AG‘s catalogsOther VAT Vakuumventile AG products
Gate valves, pendulum valves, Butterfly valves
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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.