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Flow rate: 0.00003 m³/h - 60 m³/h
Pressure: 79,289.706 Pa - 413,685.42 Pa
... as ±0.6% of reading or ±0.1% of full scale; 0.5–100% control range (200:1 turndown); 30 ms control response.
Flow rate: 0.00003 m³/h - 720 m³/h
Pressure: 79,289.706 Pa - 2,206,322.24 Pa
... DP (differential pressure) mass flow measurement technology
Flow rate: 0 m³/h - 100 m³/h
Pressure: 0.1 MPa - 0.8 MPa
... The MFC5100M series of gas mass flow controllers is designed for non-corrosive gas flow control applications, with a full-scale mass flow rate of up to 100 Ln/min. The product features ...
SIARGO
Pressure: 0.1 MPa - 1 MPa
... The MFC5000 series gas mass flow controllers are made in compliance with SEMI standards for the relevant applications. The product offers a wide range of bus communication options, including DeviceNet, ProfiNet, EtherCat, ...
SIARGO
Flow rate: 0.003 m³/h - 12 m³/h
Pressure: 100,000 Pa - 1,000,000 Pa
... OverviewSiargo mass flow controllers are designed for general-purpose non-corrosive gas flow control across multiple series covering a wide range of full-scale mass flow rates ...
SIARGO
Flow rate: 0.003 m³/h - 12 m³/h
Pressure: 100,000 Pa - 1,000,000 Pa
... and ordering codes
Technical specifications
- Application: mass flow control of non-corrosive gases
- Flow ranges: from millilitre-per-minute scales (mLn/min)
SIARGO
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