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... metal residue and metal loss • High precision resolution System resolution: 0.2-0.8 μ m • Fast detection speed Patterned wafer: 15 minutes / wafer when the number of defects ...
... with motion controller + air
bearing or linear guide
Y Axis: Linear motor with motion controller + air
bearing or linear guide
Z Axis: Ball screw + linear
guide + AC servo motor with motion controller ...
TRI Test Research Europe GmbH
... High Productivity Patterned Wafer Broad Range Inspection Systems The 8 Series patterned wafer inspection systems detect a wide variety of defect types ...
KLA Corporation
... Description
- Automated Optical Inspection (AOI) for IC substrates with minimum resolvable line/space down to 4 µm.
- Galaxy 4Cχ is CIMS' latest-generation AOI system equipped with
CIMS
... components used in filtration, fluid
control and dosing. Manufacturers need reliable
inspection to verify micro‑hole arrays, hole geometry, edge condition, surface finish and contamination inside holes.
Inspection ...
... provided by
wafer
inspection
system.
Use
Defect management in semiconductor device / CMOS device manufacturing process.
System description
The
system ...
... Imperia system detects and classifies yield-killing defects with the additional benefit of simultaneous state-of-the-art photoluminescence (PL) production monitoring. Product Overview With unique optical design technology, the Imperia ...
Onto Innovation Inc.
... The GWI System was build to detect defects in glass wafers early in the production cycle. The system is based on a high resolution smart camera to meet the required accuracy in defect ...
... AM018T wafer inspection system is a fast, accurate and comprehensive solution allowing you to detect and sort wafers by size, thickness, stain, chipping, resistivity, micro crack, P/N ...
... The FRT MicroProf DI optical inspection tool, enables inspection of structured and unstructured wafers during the entire manufacturing process. By combining 2D inspection and metrology, ...
the best suppliers