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... metal residue and metal loss • High precision resolution System resolution: 0.2-0.8 μ m • Fast detection speed Patterned wafer: 15 minutes / wafer when the number of defects ...
... High Productivity Patterned Wafer Broad Range Inspection Systems The 8 Series patterned wafer inspection systems detect a wide variety of defect types ...
KLA Corporation
... This system can automatically inspect and sort the wafers to be used for production. It has several intelligent functions, such as deep learning, machine vision, fault alert and factory MES interface. Capacity Average ...
... Imperia system detects and classifies yield-killing defects with the additional benefit of simultaneous state-of-the-art photoluminescence (PL) production monitoring. Product Overview With unique optical design technology, the Imperia ...
Onto Innovation Inc.
... The GWI System was build to detect defects in glass wafers early in the production cycle. The system is based on a high resolution smart camera to meet the required accuracy in defect ...
... The FRT MicroProf DI optical inspection tool, enables inspection of structured and unstructured wafers during the entire manufacturing process. By combining 2D inspection and metrology, ...
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