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Optical inspection system Galaxy 4Cχ
cameraautomaticmeasurement

Optical inspection system - Galaxy 4Cχ - CIMS - camera / automatic / measurement
Optical inspection system - Galaxy 4Cχ - CIMS - camera / automatic / measurement
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Characteristics

Technology
camera, optical
Operational mode
automatic
Type
for defect detection, measurement
Applications
for production, for the electronics industry
Product applications
for wafers
Configuration
in-line
Other characteristics
high-resolution, non-contact

Description

Description
  • Automated Optical Inspection (AOI) for IC substrates with minimum resolvable line/space down to 4 µm.
  • Galaxy 4Cχ is CIMS' latest-generation AOI system equipped with a color camera and Prisma™ Gen II optics for high-contrast image acquisition at production scanning speeds.
  • Designed to support high-volume manufacturing of next-generation IC substrates by combining high-resolution imaging and configurable detection algorithms powered by Spark™ 3.0.
  • Modular options and metrology packages enable in-line measurement and inspection workflows for panels and circuit elements.


Highlights
  • Linear motors for smooth and silent motion
  • Compact mechanical platform for factory integration
  • 6th-generation hardware architecture
  • Enhanced illumination block with optional X-WAVE™ multi-wave capability
  • Fast, intuitive job setup and recipe management
  • Compatible with front AMHS automation or robot handling


Options
  • Fi™ — final inspection option for finished boards
  • +2DM™ metrology — panel dimensions measurement
  • +2CD™ metrology — 2D measurement of circuit elements
  • +3DH™ metrology — 3D height measurement of circuit elements
  • +3DP™ metrology — 3D profiling of circuit elements
  • LDI™ — laser drill inspection option
  • CDB™/CDBIC™ — defect classification and virtual defect mapping
  • VVS™ — virtual verification system
  • X-WAVE™ — multi-wave illumination


Technical specifications
  • Application: Automated Optical Inspection (AOI) for IC substrates
  • Minimum resolvable line/space: 4 µm
  • Camera: Color camera
  • Optical technology: Prisma™ Gen II
  • Detection engine: Spark™ 3.0 (cross-platform)
  • Motion system: Linear motors for smooth and silent motion
  • Mechanical: Compact platform for dense factory layouts
  • Hardware generation: 6th-generation hardware
  • Illumination: Enhanced illumination block (X-WAVE™ optional)
  • Automation compatibility: Front AMHS or robot handling
  • Metrology options: +2DM™, +2CD™, +3DH™, +3DP™
  • Other options: Fi™ final inspection, LDI™ laser drill inspection, CDB™/CDBIC™ defect classification, VVS™ virtual verification

Other CIMS products

PCB Inspection and Metrology

*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.