DescriptionPanel final inspection for advanced IC substrates and ultra fine line HDI with minimum detectable line/space down to 10 µm. Galaxy Fi 10Cχ, CIMS' panel-based final inspection system, is equipped with a high-resolution color camera and optimized optical technology to maximize contrast on panels with solder mask and various metal finishes. The system supports reliable defect detection on plated copper, gold plated or OTC, solder mask and bare laminate.
Highlights- Linear motors for smooth & silent motion
- Robust mechanical structure
- Automated vacuum table for secure handling
- High-performance image processing firmware
- Next-generation computer to process large data volumes
- Fast and intuitive setup for new jobs
- Compatible with front/back AMHS automation or robot
Options- 2DM™ metrology – panel dimensions measurement
- 2CD™ metrology – 2D measurement of circuit elements
- 3DH™ metrology – 3D measurement of circuit element height
- 3DP™ metrology – 3D profiling of circuit elements
- CDB™/CDBIC™ – defect classification and virtual defect mapping
- X-WAVE™ – multi-wave illumination
Technical specifications- Product family: Galaxy Fi series (final inspection systems)
- Model: Galaxy Fi 10Cχ
- Application: Final panel inspection for advanced IC substrates and ultra fine-line HDI
- Minimum detectable line/space: 10 µm
- Imaging: color camera with high-resolution image acquisition
- Optical capability: maximized contrast on solder mask; supports plated copper, gold plated or OTC, solder mask and bare laminate
- Detection engine: Spark™ 3.0 (cross-platform detection engine)
- Motion: linear motors for smooth and silent movement
- Mechanical: robust mechanical structure
- Handling: automated vacuum table
- Processing: next-generation computer for large data; high-performance image processing firmware
- Usability: fast and intuitive job setup
- Automation compatibility: compatible with front/back AMHS automation or robot
- Available metrology options: 2DM™, 2CD™, 3DH™, 3DP™
- Available inspection/analysis options: CDB™/CDBIC™; X-WAVE™